HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

IDU/IDF

Model Primary voltage Secondary voltage A B C D E F Capacity FUSE B IDF1D-1 to 11C-1 IDU3D-1 to 11C-1 IDF15C-1 IDU15C-1 IDF1D to 11C-1 IDU3D to 11C-1 IDF15C-1 IDU15C-1 380, 400, 415VAC (50Hz) 380 to 420VAC (60Hz) IDF-TR500-3 15 500VA OUT PUT IN PUT Single phase Single turn 100VAC (50Hz) 110VAC (60Hz) 22 IDF-TR1000-3 1kVA 230 207 190 210 160 9 E D 4-F 420, 440, 480VAC (50Hz) 420 to 520VAC

Prevents Micro-Bubbles

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

•

1", 85 MSXO.8 1 ' GN E leclcic NBIllf,1-"'6J B Bellows type M6 x l B6 16. 1 6 .. GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'1'>32 ,,~ listO Pad Dia.

CL

45 50 B1 13 17 17 22 BZ GB 8 8 8 11 GQ 4 7 7 8 B 40 47 47 54 D 8 10 12 14 H2 8 8 8 10 GD 55 GL 6 9 9 11 B2 26 32 32 41 GA GR 4 7 7 7 H1 5 6 6 8 20 25 32 40 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 63.5 73.5 to 400 to 450 to 450 to 500 CXS 64.5 74.5 83.5 64.5 70 74.5 80 83.5 CXT 100.5 90.5 (mm) MX Bore 20 25 32 40 K 5 5.5 5.5 7 LC 4 4 4 4 LD 6.8 6.8 6.8 7 NA 24 30 NN P 1/8 1/8 1/8 1/4 LS 167 177 179

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 dm3/(sbar) Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

125

m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Table of Contents

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

VCC

FKM PEEK resin Special FKM Special FKM Special FKM Special FKM HNBR Special FKM 1 1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1

CA2

A A B A B A B A B A B A B Hs Hs Hs Hs Ht Hw Hw Hs Hs Ht Hs 40 13.5 0 11.5 12 15 23 8 0 0 0 18 3 15.5 0.5 40 31 38.5 31 38 50 14 0 12 12.5 15.5 23.5 8 0 0 0 18.5 3 16 0.5 43.5 35 42.5 35 43.5 63 18.5 0 16.5 17 20 28 9 0 0 1 23 4 20.5 1.5 85 85.5 93.5 49 42 91 91 93 48 42 50.5 80 22.5 1.5 20.5 21 24 32 11 0 0 3 27 6 24.5 3.5 93.5 94 102 55.5 50 107 107 101.5 54 50 59 100 25.5 2.5 23.5 24 27

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

3 Port Solenoid Valve/

Thread Rc G NPT Nil None Light/surge voltage suppressor Z With light/surge voltage suppressor A Yes 6 B 1/4 Port size Port size VP500 VP700 03 3/8" 04 1/2" For internal pilot, the symbol is nil. Refer to Piping for External Pilot Type on page 4 for selection of the check valve.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Rotary One-touch Fittings Manifold Series KM

Thread R(PT) Port B min. port size Weight (g) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 6 4 KM14-04-06-01S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 19 26 39 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 64 65.5 67.5 1 8 1 4 3 8 8 4 KM14-04-08-01S-3 31 69.5 70.5 71 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 39 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 8 6 KM14