Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Swivels

1.19 7/16-20 7/16-20 73.7 mm 53.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS610503-6-6 3.11 2.18 .88 1.31 9/16-18 9/16-18 78.9 mm 55.2 mm 22.2 mm 33.3 mm UNF-2A UNF-2A Port 2 PS810503-8-8 3.34 2.38 1.12 1.50 3/4-16 3/4-16 84.9 mm 60.3 mm 28.6 mm 36.5 mm UNF-2A UNF-2A Port 1 PS810503-10-10 3.50 2.48 1.12 1.50 7/8-14 7/8-14 88.9 mm 62.9 mm 28.6 mm 36.5 mm UNF-2A UNF-2A PS1210503-12-

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-2A SY5000 SY5000-39-2A SY7000 SY7000-39-2A SY3000 SY3000-38-2A SY5000 SY5000-38-2A SY7000 SY7000-38-2A M5 x 0.8 Rc 1/8 Rc 1/4 Series Round head combination screw Gasket Rc 1/4 SY9000 SY9000-39-2A Rc 1/4 SY9000 SY9000-38-2A SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) SY3000-11-25 Note 1) The SUP port can be on the lead wire side

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note D side SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-N9 SY9000-50-2A-N11 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A, B port with one-touch fitting for 8 C10: A, B port with one-touch fitting for 10 C12: A, B port with one-touch fitting for 12 Manifold block assembly 1 5 16" N9: A, B port with one-touch fitting for How to assemble lead wire cover 3

1

SY5000: SY5000-221-2A (2 pcs.) SY7000: SY7000-221-2A (3 pcs.)

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

V100

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Compact 5-Port Solenoid Valve

JSY3000: JSY31V-23-2A (2 pcs.) JSY5000: JSY51V-23-2A (2 pcs.) Manifold Options Base gasket * The body and plug-in spacer of the JSY1000 are separate. The connector gasket is not used.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-2A(-Q) 10-SY5000 SY5000-38-16A(-Q) 10-SY7000 SY7000-38-16A(-Q) SUP port 1 8 1 4 10-SY9000 SY9000-39-2A(-Q) 1 8 1 4 10-SY9000 SY9000-38-2A(-Q) Note) In case of 41P, 42P and 43P, for protection of the wiring unit section from drainage, piping at the EA port should be arranged so that it will not be directly exposed to exhaust from the valve.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

3 Port Air Operated Valve

N.O. 13.5 SYA 12 NC 26.2 65.2 58.2 3R 58.2 27 50 50.1 65.2 SYJA 1P 26.2 NO 12 VZA 1/4 1(P), 3(R) port 1/8 (Pitch) P = 27.5 12(PA) port 28 M5 x 0.8 (Breathing hole) VFA 7.5 L2 L1 VFRA (Station n) (Station 1) 1/8 12(PA) port VPA4 12 SYJA 73.5 54 VZA 37.5 11 2A 2A VTA 1/4 2(A) port (Pitch) P = 27.5 28 VGA 2 stations 83.5 68.5 111 96 138.5 123.5 166 151 193.5 178.5 221 206 248.5 233.5 276 261

Table of Contents

1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

LEC-OM07605CN

.1 1-1 EDB 2A.2 1-2 EDB 2A.3 1-3 EDB 2A.4 1-4 EDB 2A 1 2A.5 1-5 EDB 2A.6 1-6 EDB 2A.7 1-7 EDB 2A.8 1-8 EDB 2B 2B.1 1 EDB 2B.2 2 EDB 30.1 DB (1) (1) (1) 30.2 DB 30 (1) (1) (1) (1) 30.3 DB (1) (1) (1) 31 31.1 / SD 8 3 8.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

GA pin CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KK UNF 2A KK UNF 2A FF UNF 2A D across flats NN mounting nut (included) D across flats LB + ZC per 1" of stroke MB LB + ZC per 1" of stroke NN mounting nut (included) NN UNF 2A (in) MB1 Bore size (in) MM KK

Vacuum System Peripherals:

block assembly (Standard): SX3000-51-2A The following columns shall be filled in by SMC.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

How to Order Type 41 (5 port / Base mounted) 10-SS5YJ7-4105 01 01 1/8 A, B port size Thread type Stations P port 1/4 Nil F N T Rc G NPT NPTF 02 2 stations Applicable individual EXH spacer assembly SYJ7000-17-2A Applicable individual SUP spacer assembly SYJ7000-16-2A : : 20 20 stations A, B port 1/8 R port 1/4 Note) For more than 8 stations, supply air to both sides of P port and exhaust air