48

FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x

Compact Guide Cylinder

FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x

VQ4000

Metal seal 0.18 45 or less 47 or less 6.2 1.5 47 or less 6.9 0.17 1.7 Exhaust center 0.28 (0.34) 0 5 VQ44 1 Rubber seal 0.38 50 or less 52 or less 7.0 1.9 52 or less 7.3 0.38 2.0 0 5 VQ45 0 Metal seal 0.18 45 or less 47 or less 6.2 1.6 47 or less 6.4 0.18 1.6 Pressure center 0.28 (0.34) 0 5 VQ45 1 Rubber seal 0.38 50 or less 52 or less 7.0 1.9 52 or less 7.1 0.38 2.0 0 5 VQ46 0 Metal seal 55

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

5 Port Solenoid Valve, Series VQC

Indicator Unit (LED) Descriptions and Functions SI unit (DeviceNet) SI unit (PROFIBUS-DP) Input block 1 3 5 7 PWR 0 2 4 6 TM TM PWR(V) RUN PWR(V) MOD/NET PWR ADDRESS 1 H L 0 SETTINGS DIA BF FB FB PS PS Description Description Function Function Description Function PWR(V) ON when solenoid valve power supply is turned ON. ON when sensor power is turned ON.

VQC

Indicator Unit (LED) Descriptions and Functions SI unit (DeviceNet) SI unit (PROFIBUS-DP) Input block 1 3 5 7 PWR 0 2 4 6 TM TM PWR(V) RUN PWR(V) MOD/NET PWR ADDRESS 1 H L 0 SETTINGS DIA BF FB FB PS PS Description Description Function Function Description Function PWR(V) ON when solenoid valve power supply is turned ON. ON when sensor power is turned ON.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

Profile Design ISO/VDMA Air Cylinder Series CP95

ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20 40 10 9 65 15 6.5 5 51 19 63 56.5 15 32 16 21 23 45 12 9 75 15 6.5 5 80 72 18 36 20 25 27 45 14 11 95 18 10 5 100 89 18 41 20 25 30 55 16 11 115 18 10 5 1.8-11 Series

Shock Absorbers and Rate Controls

.63 (l.R)0tl{l l.l 5x2 8.54 8.74 174-t2lJNF .38 l . t 3 1.20 5.43 t.l0 .55 .21 l . t 2 .63 (LR)OIl{ll.25r I 5.92 6.12 r%-r2 UNF .38 t . t 3 1.20 3.81 t.l0 .55 .2t 1.25 .0J (LR)Otlll|.25r2 8.54 8.7 4 r%-r2 UNF .38 t . t 3 1,20 5.43 t . t 0 .55 .21 t.25 .63 ^otesr 1 Alrshdk absorbrs wr]] ldnclro. satistiiCof,t dt 5% of the r narimum raied ener4y per c!

XL

Applicable Series 001 002 No.1 Solenoid No.2 Solenoid XSA1 XSA2 003 No.3 Solenoid XSA3 53 48VDC 100VDC 55 Note 1) If the leading "0" is removed from voltage symbols 05, 06, these are the same as the solenoid valve symbols.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F FB FC FT FX FY FZ GA GB H MM NA NB NN S Z 10 15 12 14 4 8 13 4.5 1.6 24 14 32 8 5 28 M4 x 0.7 12.5 9.5 M8 x 1.0 46 74 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 8 5 28 M5 x 0.8 12.5 9.5 M10 x 1.0 47 75 5 Series CJ2Y Dimensions Head flange (G) CJ2YG Bore size Stroke Z Mounting nut MM NN GA Piping port 2 x M5 x 0.8 GB NN Cover surface Rod end nut C D B 0 0.3 FY FB 2 x

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

Compact Guide Cylinder

MGPKM, MGPKL [mm] Bore size [mm] Standard stroke A B C DA DB E FA FB G GA 50 st or less Over 50 st 100 st or less Over 100 st 100 st or less Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st 32 25, 50, 75, 100, 125, 150, 175, 200 60 78 52.5 55 37.5 40 14 16 7.5 25.5 23 12 3 45 12 40 69 87 64 47 16 16 5 23 12 5 49 15 50 79 100 69 48 20 20 10 31 16 5 59 15 Bore size [mm] GB H

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Vacuum

Also 2 series for suction flow up to 6.9scfm (200Numin). catalog #N404. 55 Efticient $stage nozzle design Enersy Savins z.zt'{sfi#({{fri ilninl compact . Larse Ftow s.

Vacuum

Also 2 series for suction flow up to 6.9scfm (200Numin). catalog #N404. 55 Efticient $stage nozzle design Enersy Savins z.zt'{sfi#({{fri ilninl compact . Larse Ftow s.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L L (60) 44 Approx. 10 8 16 14 25 1 13 47.04 55 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Terminal no. Socket side Plug terminal no. (Arrangement as seen from lead wire side) D-sub connector cable assembly Terminal no. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i @1 !6 !7 w e r !8 Lead wire color Terminal no. Dot marking @5 Black 1 None @6 Brown 2 None !