LEC-OM07605CN

PC09] CCW CCW 00 01 8 [V] 8 [V] 0 0 -8 [V] -8 [V] CW CW CW CCW 8 [V] 8 [V] 02 03 CW CCW 0 0 CCW CCW 04 05 8 [V] 8 [V] () 0 0 () -8 [V] -8 [V] CW CW CCW CCW 06 (1356) (10V/100pulses) 07 (1356) (10V/1000pulses) 10 [V] 10 [V] 100 [pulse] 1000 [pulse] 0 0 100 [pulse] 1000 [pulse] -10 [V] -10 [V] CW CW CCW CCW 08 (1356) (10V/10pulses) 09 (1356) (10V/10pulses

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Metric size Inch size Elbow Universal 2 3 1/8" 01 23 AS 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" AS-FE KE 6 3/16" Control U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

LEC-OM02704CN

] [0][0] 4 14 12 14 [3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B 8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [0][1

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT (mm) A One-touch fitting d Part No.

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cF , 06, a8 010 0 10 012 rv,iIljme:tersi~e 06 08 08 01 /4" Tube out&ide . Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 .