V

Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

HRX-OM-Q026

: 40 oC 10 8 6 4 2 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-12: Cooling Capacity (HRSH100-W-20-) 8.4.7 HRSH150-W-20/4025 Facility water temperature: 32 oC 20 Cooling capacity [kW] 15 Facility water temperature: 40 oC 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-13: Cooling Capacity (HRSH150-W-20/40-) 8.4 Cooling Capacity HRSH Series 8-16 HRX-OM-Q026

HRX-OM-M090

-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.8 Compliance . 9-16 9.9 Sample DoC. . 9-17 9.10 Daily Check Sheet . 9-18

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

SQ1000/2000

When ordering with manifolds, add "-N" at the end of the manifold number. 1 2 3 4 5 6 7 8 ... n: Stations 53 Silencer cover Blanking plug (for One-touch fitting) L Dimensions 04 06 08 10 Applicable fitting size d 4 6 8 10 A Model A L D KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 This is inserted into the cylinder port and SUP and EXH ports that are not used.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

10 12 Only R is available.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

53.5 46.1 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 16.2 12.9 20.6 23 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 23 59 18.5 19 AS431FG-04-10 AS331FG-N03-11 32.6 58 53.5 21 32.6 49.4 43.7 10 18.5 3/8" 17.9 16.2 104 65 16.2 23 21 25.8 R 1/2 57.6 50.1 28.6 24 49.6 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 61.7 55.3 22 32.6

CL

6 6 8 TD 8 9 9 10 TT 10 10 10 11 TY 32 40 40 53 TX 32 40 40 53 TZ 52 60 60 77 Z 173 187 189 Bore 20 25 32 40 PW S 127 1/8 1/8 1/8 1/4 38 M10 X 1.25 41 41 137 139 167 M10 X 1.25 M14 X 1.5 222.5 41 Integrated Clevis (E) CLM2E Bore size Stroke (mm) A 18 22 22 24 BP BQ BZ 57.5 69 69 76 D 8 10 12 14 GB 8 8 8 11 BC 38 45 45 52 AL 15.5 19.5 19.5 21 CD 8 8 10 10 BN 80 90 90 B1 13 17 17 22 CX 12 12

VQ7-6/7-8

for 12 10 For 10 stations AXT502 1A Replacement Parts (For manifold block) Cylinder port location Description Material Qty.

•

12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

VQ5000

Maximum 9 stations (12 stations available as an option. Indicate 10 to 12 stations on the manifold specification sheet.) One station is used for serial unit mounting.

HRX-OM-R016

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-R016 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

HRX-OM-R005

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-R005 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

HRX-OM-W038

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-W038 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

HRX-OM-O021

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-O021 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

ASR

Note 3) Not used for 10 and 12. 15-16-9 10 Series ASR/ASQ Flow Characteristics Pressure Valve: Series ASR (Inlet pressure: 0.5 MPa) ASR430F ASR530F ASR630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 12 1000 15 300 4 8 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle