Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

11 13.5 A 21 16 14 16.5 A 9 7 9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W

SY

SS5Y33, #5 (#5 + #8 + #9 + #11) 4 3 2 5 6 7 8 9 10 11 12 13 14 15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two

ZP

16 20 32.5 39 49 11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Made to Order

MH + Stroke Y + Stroke ZZ + 2 strokes MGC Series (mm) MT Bore size (mm) R Y MA MB MC MD MI MK MM MGC series 20 to 50 20 25 32 40 50 12 77 12 10 3.6 8 14 7 M6 x 1 9 12 77 17 13 5 10 20 9 M8 x 1.25 11 12 79 17 13 5 12 20 9 M8 x 1.25 11 Front mounting flange Width across flats MB Width across flats MA M10 x 1.25 13 87 19 17 6 16 25 10 11 M14 x 1.5 14 102 24 19 8 20 32 13 11 MD MI MM Adjustment

Air Cylinder

(18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size NA S TA TB ZZ Bore size TC TD TE TF TG 20 24 69 (77) 11 11 106 (114) 25 29 69 (77) 11 11 111 (119) 32 35.5 71 (79) 11 10 (11) 113 (121) 40 44 78 (87) 12 10 (12) 130 (139) 50 55 90 (102) 13 12 (13) 150 (162) 63 69 90 (102) 13 12 (13) 150 (162) 80 86 108 (122) 182 (196

CL

#2 (#2+#11) , #3 (#1+#3+#11) , #4 (#1+#4+#11) , #5 (#1+#5+#11) , #6 (#6+#11+#13) , #7 (#7+#11+#13) , #8 (#1+#8+#11) , #9 , #10 Rubber bumper basic style Air cushion basic style Axial direction foot style Front flange style Rear flange stye Front trunnion style Rear trunnion style Clevis style Accessory Rod boot Bore size Bore size Bore size Bore size Bore size Bore size Bore size Bore size

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Air Cylinder

26 8 20 0 0.033 13 10.5 8 41 5 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 8 10 32 32 52 36 25 22 19.5 17 32 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 9 10 40 40 60 40 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 9 10 40 40 60 40 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 10 11 53 53 77 44.5

CQ2

11 13.5 17.5 21.0 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5

LEC-OM02704CN

LEC-MR-J3BAT 19X(10)Y(11)Z(12) 200410SERIAL 4X 13 13 13 13.4 UVW 600VEP(2PNCT) 8 UL/C-UL(CSA)UL60 30m (1) U L 1 U L 2 V V L 3 ( ) W W L 11 L 1 2 B1 B 2 N C C P (2) CN1 CC-Link ((3)) BU BV BW OHS1 OHS 2 .

NCA1

3 1/2 4.25 1/2 1 1/2 3 13/16 R ADD STROKE ET F G J K BORE E EB EE(NPT) EL EO ES LB P SE 6.44 5 7/8 3 1/4 7 3/8 2 1/32 3/4 2 1 1/2 9/16 8 8 1/2 11/16 3/4 1 1/8 5/8 2 1/4 7.92 7 1/8 4 1/8 9 2 11/16 3/4 2 1/4 2 11/16 10 10 5/8 13/16 1 1 5/16 5/8 2 3/4 9.40 7 5/8 4 5/8 9 1/2 10.90 8 7/8 5 1/2 11 1/8 3 5/16 3/4 2 1/4 2 11/16 3 13/16 3/4 2 3/4 2 1/4 3/4 12 12 3/4 13/16 1 1 5/16 5/8 3 1/2 14 14

Air Cylinder NCA1 Series

3 1/2 4.25 1/2 1 1/2 3 13/16 R ADD STROKE ET F G J K BORE E EB EE(NPT) EL EO ES LB P SE 6.44 5 7/8 3 1/4 7 3/8 2 1/32 3/4 2 1 1/2 9/16 8 8 1/2 11/16 3/4 1 1/8 5/8 2 1/4 7.92 7 1/8 4 1/8 9 2 11/16 3/4 2 1/4 2 11/16 10 10 5/8 13/16 1 1 5/16 5/8 2 3/4 9.40 7 5/8 4 5/8 9 1/2 10.90 8 7/8 5 1/2 11 1/8 3 5/16 3/4 2 1/4 2 11/16 3 13/16 3/4 2 3/4 2 1/4 3/4 12 12 3/4 13/16 1 1 5/16 5/8 3 1/2 14 14

CM2

SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A, #11 SCM240A, #11, #5 SCM240A, #11, #5, #19 1.4-42 Series CM2 Single Clevis (C) CM2C Bore size Stroke S T (mm) N P Bore U E CD I RR A NA CI K AL NN CX L B1 D MM F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Table of Contents

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

Compact 5-Port Solenoid Valve

COM. 13 14 13 14 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 1 2 1 2 1 2 (P, PC: 26 pins) (PG, PGC: 20 pins) (PH, PHC: 10 pins) A mixture of single and double wiring can be specified on the manifold specification sheet. The maximum number of stations is determined according to the number of solenoids.

Vacuum Pad

16 20 32.5 39 49 11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

JIS Standard Hydraulic Cylinder

10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

11 13.5 A 21 16 14 16.5 A 9 7 9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W