3 Way,3 Port Solenoid Valve NVZ Series

(OFa8tsning torque ONote that when using a C-B element for contact protection, lhe !,/oltage leakagE may increase due b the current lealge flowing through the GR element. 1317.3 60.6-78.0 ..:i Vollage lakage Qaality of Operating Fluid O,A filtsr of about 5 microns is preiErred. OLRemow drain trom the system periodically.

NVZseies

(OFa8tsning torque ONote that when using a C-B element for contact protection, lhe !,/oltage leakagE may increase due b the current lealge flowing through the GR element. 1317.3 60.6-78.0 ..:i Vollage lakage Qaality of Operating Fluid O,A filtsr of about 5 microns is preiErred. OLRemow drain trom the system periodically.

Compact Guide Cylinder

(M3, M5 type only) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

1.63

C 0.2 B 0.2 0.1 A 0.2 0.05 100 1000 D (mm) MGPWM MGPWL/A Hexagon socket head cap screw 126 146 176 192 240 266 Maximum speed (mm/s) Bore size (mm) A (mm) B (mm) C (mm) 20 25 32 40 50 63 24 30 34 40 46 58 108 128 156 172 220 248 12 14 18 18 22 22 12 15 18 18 22 22 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Other Caution Do not use this cylinder as a stopper. 518

15

BS Bumper bolt (resin tipped): Plate B side or C side Shock absorber Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center axis (B) Number of teetha 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5.

Air Cylinder RSQ Series Stopper Cylinder

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

FSQ seies

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1.

AC Servo Motor Driver (MECHATROLINK-III type)

Error Gr.1 A.320 Regenerative Overload Gr.2 A.330 Main Circuit Power Supply Wiring Error Gr.1 A.400 Overvoltage Gr.1 Alarm A.410 Undervoltage Gr.2 A.450 Main-Circuit Capacitor Overvoltage Gr.1 A.510 Overspeed Gr.1 A.511 Overspeed of Encoder Output Pulse Rate Gr.1 A.520 Vibration Alarm Gr.1 A.521 Autotuning Alarm Gr.1 A.710 Overload: High Load Gr.2 A.720 Overload: Low Load Gr.1 A.730 Dynamic

AC Servo Motor Driver (MECHATROLINK-II type)

Error Gr.1 A.320 Regenerative Overload Gr.2 Alarm A.330 Main Circuit Power Supply Wiring Error Gr.1 A.400 Overvoltage Gr.1 A.410 Undervoltage Gr.2 A.450 Main-Circuit Capacitor Overvoltage Gr.1 A.510 Overspeed Gr.1 A.511 Overspeed of Encoder Output Pulse Rate Gr.1 A.520 Vibration Alarm Gr.1 A.521 Autotuning Alarm Gr.1 A.710 Overload: High Load Gr.2 A.720 Overload: Low Load Gr.1 A.730 Dynamic

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

CNA

GL GR D E MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA -X 40 50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95

CNA

JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.

CNS

B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.