MG

B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.

Electric Actuator/Slider Type

M J D 4 x O1 thread depth R M Y K Note 2) L B + Stroke 4 x O1 M S A + Stroke thread depth R EH Note 1) Range within which the rod can move.

Air Cylinder

ZZ S ZZ S ZZ S ZZ S ZZ 20 87 141 112 166 137 191 25 87 145 112 170 137 195 32 89 147 114 172 139 197 164 222 40 113 179 138 204 163 229 188 254 213 279 Symbol Symbol Bore size Bore size Female Rod End (mm) Stroke A1 H MM 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6

Rotary Actuator

F CRQ2X MSQX BC CB CB BC U UU MRQ A port B port C BB BB M 2 x Port size N A SB BA BA 0 0.2 G S D (g6) L 0 0.2 D is the shaft dimension.

smcmaintenancepartslist

steel 316 B S T G H P M L Sintered metal Note) For a comparison with the nominal filtration accuracy according to the element category, refer to Best Pneumatics No.7.

MGP

or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 10 1 5 0.5 25 25 20 Load weight m (kg) 20 Load weight m (kg) 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40

REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ) ZPY Pad dia.

Table of Contents

How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.

AC

2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

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NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!L M (mm) (mm) ,B C ,K , L Model 0 F H V M E G ZPY10B 10 12 76 87 16 26 42 5.5 13.8 5.5 53 .ZPY.138 j3 44.5 78.5 89.5 8.7 7.5 15 t8.5 28.5 55.5 19 ZPYI86 16 46 57 18 20 30 60 91 9.9 21 8.5 Applicable lube ApQ licable tUDe .E' Q R ~y'on tube, 4 / 2.5) 14.5 5 1.8 !

42

(Double) 163 (3-position) 58.2 96.2 458 Base Mounted Plug-in Unit VQ4000 Series Bottom ported drawing SV SYJ M5 x 0.8 Ground screw 1/8" External pilot port SZ 10.7 47 106 VF 1/4" 4(A), 2(B) port 9 71.7 Connector location on U side (FU) 9 U side VP4 27 n VQ 1/2 X 12 X B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 VQ 4/5 VQ 4/5 8 A A A A A A A A B B B B B B B B VQC 1/2 7 SMC SMC SMC SMC SMC SMC SMC 6 VQC

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

air cushion Piston speed M5 x 0.8 50 to 1000 mm/s Relief port size Auto switch can be mounted.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80