Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

T MODEL SC 120 80 4 46.2 1 ERR T/R RUN (35) 0 10.6 Drawing shows a SC case. 4 x M5 mounting hole D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

CQ2

Refer to p.2.3-6 for parts No. of auto switch mounting brackets. 2.3-2 Compact Cylinder/Standard: Double Acting Single Rod Series CQ2 Style 20 25 32 40 50 63 80 100 Bore size (mm) 16 12 Through-hole (Standard) Mounting Both ends tapped Built-in magnet Pneumatic Air-hydro (1) M5 X 0.8 M5 X 0.8 M5 X 0.8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 3/8 Rc(PT) 3/8 Rc(PT) 1/4 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Screw-in

MY1

Wall mounting z y P. 8-11-36 P. 8-11-6 Wa: Connection plate t = 10 (880 g) x y ( = 1/100) x z MY1C40-500 Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

Modular F.R.L. Unit

T-interface (T) Factory mounting of a piping adapter on the AC models is available as a special order. M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-interface facilitates the redirection of air flow.

Smooth Cylinder/Low Speed Cylinder

D-X 1257 Series CUX Dimensions: Double Acting, Single Rod 10 2 x P through 2 x M5 x 0.8 Rod end nut 4 x NN 2 x P through Auto switch 4 x T counterbore S + Stroke Z + Stroke 16 to 32 2 x P through 2 x M5 x 0.8 (32: Rc 1/8) Rod end nut Rod End Nut/Accessory 4 x NN Material: Carbon steel Part no.

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

Rotary Actuator/Vane Type

L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Q1 = M L1 = L1 + (3 x P) L2 = The maximum dimension L1 is, as a rule, twice the thread size. (Example) For M3: L1 = 6 mm The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Air Fittings & Tubing

<M5, M6> D P M Part No.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

0.4

C4 2-position 3-position exhaust center Option None With bracket Nil IN side port size OUT side port size 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) F M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting

•

AdaprOf PHiS I J t ~ (r I Re I .m."~ =~~P~a'~-t -, .~.@. Deteriorated Pad 36 Vacuum Pad/Components VacuumPad/Components Part/ Pad(With Lock Ring) Flat type pad Flat type pad with rib ZPlOCO-5OCO ZP02UO 08UO .0 oC (mm, ' , 19.5 3,e I C 'A . t El' K; 11'0 E ' Part No.

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

SY

DIN rail] 21 P = 24 (Pitch) Manual override 13.5 DIN rail holding screw + Tightening torque: (0.55 to 0.65)Nm + 13.8 69.5 83.8 PE X EB P EA PE X EB P EA 4 A B 2 4 A B 2 4 A B 2 4 A B 2 4 A B 2 56.3 5.5 53 53 38.1 35 5 EA 3 EB 1 P 25.5 25.5 184.1 16.3 33.6 167.6 25 96.6 8 130.4 38.1 48.3 n 2 6-Rc 3/8 (P, EA, EB port) + + + + + Triangle mark 2-M5 x 0.8 (pilot, EXH

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Hydraulic

T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.