5

Applicable bore size Dd9 d L L1 m t Included retaining ring Part no.

MGP

or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 10 1 5 0.5 25 25 20 Load weight m (kg) 20 Load weight m (kg) 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40

SYJ300/500/700

External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.

ISO Cylinder

S Single acting, Spring return T Single acting, Spring extend Made to order For details, refer to page 71.

Battery-less

Select Nil, S, or T for DeviceNet or CC-Link.

0.4

P kit 1 to 12 stations Side 754 (Double, 3-position) C6 (6) VQC101-5 F kit: D-sub connector M5 (M5 thread) T kit 1 to 10 stations P kit: Flat ribbon cable T kit: Terminal block box S kit 1 to 8 stations: EX500 1 to 12 stations: EX250 S kit: Serial transmission C10 (10) Option: Direct EXH outlet with built-in silencer Branch type C12 (12) L kit: Lead wire 1076 (Single) C4 (4) M kit: Circular

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Series VQ Metal Seal/Rubber Seal Body Ported

(Sunx) 8 point S-LINK System (Sunx) T-LINK Mini System (Fuji Electric.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

XA Section Y S Q GA 0.5 FA FB C Y EH T X M EA EB B + Stroke A + Stroke Note 1) Range within which the rod can move.

42

(For F, L, S, T kit) 1. D-side end plate assembly part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

Air Slide Table

MXQ 8C-mm5 With buffer, axial piping (8) Pilot port M5 x 0.8 (OUT) 24.3 9.8 2 Pilot port M5 x 0.8 (IN) 13 6.3 Pilot port M5 x 0.8 (IN) 24.3 9.8 33.4 21 Symmetric type 28.5 6.3 2 x M3 x 0.5 thread depth 5 M Dimensions [mm] Pilot port M5 x 0.8 (OUT) 17 2.3 17.4 Model Standard type Shorter total length type ZZ M M MXQ8C-10Zl5 85 76.5 77.5 MXQ8C-20Zl5 95 86.5 87.5 MXQ8C-30Zl5 105 96.5 97.5 MXQ8C

Aluminum High Vacuum Angle Valve

flange surface Symbol S K L S L M K L M Pilot port direction Solid state auto switch D-M9P(M)(L)(Z) Left flange surface D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

Compact 5-Port Solenoid Valve

2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

Modular Design with Uniform Body Style

N S J M U Bracket (Option) D R C B V Q IN OUT 2 x P (Port size) A Clearance for maintenance G S N T U D M J AL30-D to AL40-06-D R C V Q IN OUT 2 x P (Port size) B A E Clearance for maintenance G AL50-D to AL60-D T N S J M D U Bracket (Option) R V Q C B IN OUT 2 x P (Port size) A Clearance for maintenance G 91 Lubricator AL20-D to AL60-D Series Semi-standard PC/PA bowl Metal bowl Metal bowl

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .