CATALOG

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Table of Contents

(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Digital Flow Switch

A2 Bracket B (Horizontal mounting) Part no. Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

OMR0032

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red * Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black I/O

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Rotary Table/

tubing and steel piping P l = Operating pressure [MPa] O.

OMR0031

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red *LE CP1 Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 10, 11, 12 Effective

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-F TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS3001F AS4001F AS-FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) KE AS-FG

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FG, AS4211FG AS3201FG, AS3211FG Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle

MXS Series Air Slide Table

Note2) Functional options are not available for MXS L.

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

ZSE20C: ZSE20C, Rated Vaccum Range: -100 to 100 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -