Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 0.43[0.33] 0.32 10-SYJ3443 10-SYJ3543 0.42[0.33] 0.16[0.080] 37 55 36 53 41 63 10-SYJ3123 2 position 10-SYJ3223 5 port body ported 0.9 M3 x 0.5 M3 x 0.5 10-SYJ3323 3 position 58 56 66 10-SYJ3423 10-SYJ3523 37 55 36 53 41 63 10-SYJ3133 2 position 4 port base mounted (For manifold base only)Note 1) 10-SYJ3233 1/8 10-SYJ3 M5 x 0.8 3 position 58 56 66 10-SYJ3433 10-SYJ3533 Note 1) Dedicated

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

.: 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 100.1 [102.3] 77.9 (Lead wire length) 13.6 B A 101.8 [104] (For manifold mounting) 2 x 4.2 Manual override 19 42 (52) (66) (For mounting) 2 x 4.2 (Light/surge voltage suppressor) (5.5) 1.2 (5.5) 47.6 12.5 (42.5) (49.5) 16.1 47.6 31.5 [38.5] + 24.5 28 10-SY7120-02(-F2) G H Air Preparation Equipment Pressure Control Equipment Flow Control

4-channel Flow Monitor ( compatible)

(Refer to page 66)) (3) Change the set value with UP or DOWN button, and press the SET button to set the value. Then, the setting moves to setting of OUT2. (The snap shot function can be used. (Refer to page 66)) (4) Complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left). Continue with setting the OUT2.

Air Fittings & Tubing

17 10 76 21 33.5 23.8 18.5 17 26.5 1 2 KQ2W10-04S 65 66 145 68 78 22 1 4 3 8 62 63.5 57.5 59.5 KQ2W12-02S KQ2W12-03S 17 12 22 47.7 37.7 20.9 17 28.5 1 2 KQ2W12-04S 66 68.5 22 147 101 105 3 8 1 2 71 (71) 76 80 KQ2W16-03S KQ2W16-04S 26.5 22 69.5 75 20.9 34 25 100 (84) 16 Reference dimensions after R(PT) thread installation.

SYJ3000/5000/7000

) 3 position 0.42 [0.33] 0.16 [0.080] SV 36 53 41 63 37 55 2 position SZ 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 SY 36 53 41 63 37 55 Note 1) 4 Port Base Mounted (For manifold base only) 2 position SYJ 1/8 M5 x 0.8 56 66 58 3 position SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

MXQ

66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 123 123 123 133 157 182 221 274 299 MXQ25L-10 MXQ25L-20 MXQ25L-30 MXQ25L-40

MGP

FB 50 Stroke 66 67.5 109 109 117.5 117.5 121 141 51 Stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 * Other dimensions are same as standard.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ2510 13-/22

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

CM2

H2 I B D K MM N NA NN P S Bore size (mm) 0 0.033 20 41 8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66

MG

st to 100 st 68 78 93 98.5 Bore size (mm) FB B Over 100 st 117 117.5 30 st or less 56 62 76 82.5 18 18 19 19 55 59 66 66.5 12 16 20 25 2.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

CM2

Z H MM ND +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 9 10 14 18 25 66 41 M8 X 1.25 9 M10 X 1.25 9 10 14 22 25 69 45 9 M14 X 1.5 16 13 25 24 49.7 92 50 12 Double Knuckle Joint (mm) Applicable bore size A1 Applicable pin part No.

A

IS1000E-402 14 33 87 66 17.5 IS1000E-403 38 AC4000 IS1000E-404 12 IS1000E-406 34 50 87 66 17.5 H O W T O O R D E R P R E S S U R E S W I T C H *Without Yoke Clip.

VQZ1000/2000/3000

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 35.5 M plug connector (M): VQZ3120 1(R)-M-C6/C8/C10/02 Cover diameter 1.5 Cross section 0.23 mm2 77 (Lead wire length) 300 102.5 66 114 Indicator light 37 <42> < >: AC 2-7-15 Body Ported 16 16 Series VQZ1000/2000/3000 Dimensions: VQZ3000 2 position double Grommet (G): VQZ3220 1(R)-G-C6/C8/C10/02 300

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

LEC-OM02704CN

6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75 7.4 76 7.5 78 7.6 7-10 7.7 7-14 7.7.1 JOG

VQC

BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25