AC

End plate ass'y 1 pc. 1.5-26 ARM2500/3000 Dimensions Dimensions B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Manifold stations Dimensions by Number of Stations 10 Model Symbol 9 8 7 6 5 4 3 2 454 412 370 328 286 244 202 160 118 L1 ARM2500 442 400 358 316 274 232

KJ

(mm) Model Effective area (mm2) Weight (g) 3-connection thread M L 8 6 4 DT04-00 32 DT06-00 36 10 10 10 12 5.7 14 15 16 23.5 23.5 DT08-00 47 12 14 16 25 24.5 DT10-00 10 12 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female Connector: DHF H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L2 L3 With auto switch Without auto switch Standard stroke (mm) Bore (mm) 12 16 20 25 L L1 FD FT FV FX FZ Inch Inch Metric 24 25.5 28.5 32.5 Metric 14 15.5 18.5 22.5 A 44 44 55 59 B 27 27 36 39 A 39 39 45 49 B 22 22 26 29 11.5 11.5 12.5 14.5 21.5 21.5 22.5 24.5 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 3.5 3.5 4.5 5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 5 to 30 5 to 30 5 to 50 5 to 50

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

C95

10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3

CJ2

D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

MY1

322 QW 30 36 42 51 59 Z 160 200 220 280 340 NW 37 45 53 64 75 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K X [mm] LEYGlM (Sliding bearing) [mm] LEYGlL (Ball bushing bearing) Size Stroke range (mm) L DB Size Stroke range [mm] L DB (0.5) Section XX 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 25 15 to 110 91 10 115 to 190 115 195 to 300 133 Z WB WA WC + Stroke 32 20 to 55 74 16 60 to 185 107 190 to 300

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10 x 1.25 M32 x 2 23 10 8 M14 x 1.5 3.2 134 The bracket is shipped together.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

SMC

65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA F H MM U FD FT FX FY ZX ZY Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 4 39 44 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 5 45 55 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 5 55 67 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

7

) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.