Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Bellows, Cup Material: Silicone Rubber , White, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø32, Cup Form: Bellows, Cup Material: NBR, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø32, Cup Form: Bellows, Cup Material: Silicone Rubber , White, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Multistage Bellows, Cup Material: Silicone Rubber , White, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø32, Cup Form: Flat, Cup Material: Urethane Rubber, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Bellows Type for Film Packaging Workpieces, Cup Diameter: ø20, Cup Form: 2.5-stage Bellows, Cup Material: Silicone Rubber, Blue, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø20, Cup Form: Bellows, Cup Material: FKM, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø20, Cup Form: Flat with Rib, Cup Material: NBR, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Flat with Rib, Cup Material: Urethane Rubber, Attachment: with (Guide) Attachment
Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø10, Cup Form: Flat with Rib, Cup Material: NBR, Attachment: with (Guide) Attachment
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !
Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size
5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 R E C L 25 150 M9BW C Number of auto switches Mounting Nil S n B L F G 2 pcs. 1 pc. n pcs.
A contact protection box is not required for solid state auto switches due to their construction. q Where the operation load is an inductive load. w Where the wiring length to load is greater than 5 m. e Where the load voltage is 100 VAC.
Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.