Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

150 200 250 300 IRV Flow rate (L/min (ANR)) Inlet pressure (MPa) VEX ARP30(K) ARP30(K) Rc 3/8 SRH 0.50 0.25 SRP 0.45 0.40 SRF Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point VCHR 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K) Rc 1

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

150 200 250 300 IR Flow rate (L/min (ANR)) Inlet pressure (MPa) IRV ARP30(K) ARP30(K) Rc 3/8 VEX 0.50 0.25 SRH 0.45 0.40 SRP Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point SRF 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVH 0.10 ITVX 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32

3 Way,3 Port Solenoid Valve NVZ Series

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

SFOD-OMT0012

For LEY16RA-75, enter "LEY16RA" and select LEY16RA-100. For LEFSH (High precision type) Enter "LEFS" to search without the High precision specification. e.g.) For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300.

IDX-OM-U022

300 4.2.2 IDFA100F150F 4 1 4.1 IDX-OM-U022 4. 501015 ( ) ,0 IDFA100F150F 4 2 4.2 IDX-OM-U022 4.

PSxx-OML0002CN

-2No.PS-OML0002CN-G 1 1.5 3) 3) 1 1 () [] -3No.PS-OML0002CN-G () () () () -4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A

PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

PF2D

(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note

NVZseies

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 100 100 110 120 20 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 20 + 55 (n 2) 2 100 + 55 (n = 4, 8, 12, 16 )Note 2) 100 + 55 110 + 55 120 + 55 D-A59W "n" pcs. (same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 1 pc. 100 100 110 120 15 1 or 2 pcs.

JIS Standard Hydraulic Cylinder

95 2 105 115 100 35 + 30 (n 2) (n = 2, 3, 4) 80 + 30 (n 2) (n = 2, 3, 4) 115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1000 40 32 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (C rod retraction, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 50 m 1000 40 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (extension, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 m 50 1000 40 32 10 100 100 1000 Speed (mm/s) 31 Series CH2E

Compact Guide Cylinder

[mm] MGPKM, MGPKL Bore size [mm] Standard stroke A B C DA DB E FA FB 50 st or less Over 50 st 100 st or less Over 100 st 100 st or less Over 100 st 100 st or less Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st 12 10, 20, 30, 40, 50 75,100,125,150 36.5 53 75 36.5 39 27.5 30 6 8 0 16.5 36 7 2 16 38 58 86 38 41 28.5 31.5 8 8 0 20 45 7.5 2 20 20, 30, 40, 50, 75, 100 125, 150,

ISO Standard Hydraulic Cylinder

32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Compact Guide Cylinder

Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Bore sizes 80, 100 added. Port thread types NPT, G added.

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 5 10 15 20 25 30 CRA1 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement