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1 Drain q r e w t i u y o !0 !

15

m L Mounting orientation m m Max. speed [mm/s] SpeedVertical Work Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y u, i Graph (Ball bushing bearing type) e, r o, !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Base Mounted Metal Seal/Rubber Seal Series VQ

(Values at the initial period) Value for high voltage type (1.5 W) Value for low voltage type (0.5 W) Dusttight/Low jetproof type (IP65) is available on T, L, S and M kits of VQ2000.

Modular F.R.L. Units

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

JXCx-OMT0023

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

AN

.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, DC, ZH NOZZLE SIZE 1.3, .08250 lb

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, DD, ZH NOZZLE SIZE 1.3, .11660 lb

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Regulator for 2 MPa ARX 20

G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

LJ1H

5 w e r t @0 !4 !3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

NCQ2/CQ2

Knuckle Pin (Common with double clevis pin) Rod End Nut 30 d Dd9 d C D t t m m l L B H Material: Carbon steel Surface treatment: Nickel plated Material: Carbon steel (mm) (mm) Part no. Applicable bore size (mm) Applicable retaining ring Part no.

AC Servo Motor Driver (CC-Link Type ）

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

0.4

4 w !1 !3 r !2 e u t 61 Exploded View of Manifold F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Housing assembly and SI unit no. No. Manifold Part no.

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !