Nominal Nozzle Size: 0 (for Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type), Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.)

: K (with Operation Manual and Calibration Certificate)

Air Cooled Aftercooler Series HAA 1

Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

PVC Quick Drain Valve

0 1 Body PVC 2 Housing PVC LVW LVW q 3 Poppet PTFE w 4 Union end PVC LQ1 5 Union nut PVC 6 O-ring EPDM FKM LQ3 7 O-ring EPDM FKM 8 O-ring EPDM FKM LVN 9 O-ring EPDM FKM 10 O-ring EPDM FKM LQHB OUT TL TIL TLM TILM Dimensions TD TID TH TIH D3 D2 D1 IN L1 L2 L4 L3 L1 2 x Rc1/8 (NPT1/8) Pilot port PA PB Dimensions (mm) Part no.

0.01

Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard

Manifold Regulator ARM1000/2000 Series

19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ ARM2000 VY1 VBA VBAT AP100 753

Manifold Regulator Modular Type ARM2500/3000 Series

SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.

Size/Valve Type: 6 (25A, N.C.), Body/Port/Orifice: K (C37; Port 1;, Orifice 25), Voltage/Electrical Entry: Q (200VAC, Conduit Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Air cooled Thermo-con (Compact type)

L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002-A6 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.

Air cooled Thermo-con (Compact type)

L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z INR-244-831 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

ARJ1020F

Description Note Body Valve guide Piston Bonnet Handle Adjusting spring Valve Material VEX PBT Brass Polyacetal Brass Brass Steel wire Brass q w e r t y u Replacement Parts Electroless nickel plated AW Mounting/Adjustment No.

3 Port Air Operated Valve Series SYJA300 1

230 3 4 1.5 VPA3165 1 11 4 11 4 11 4 11 2 VPA3185 2.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions 3-Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K

I

Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h dNrr,'J]7,k

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Before tightening Nut Tubing support Tubing Insert bushing w e r New PFA New PFA New PFA Series LQ 1 2 After tightening Quadruple sealing parts q Needle Valve Series LVN Needle Valve Series LVN V Fluid adjustment range 0 to 12 l/min V Integral fitting construction HYPER FITTING, Series LQ2 is used.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

Size: 0 (for Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

Size: 0 (for Vacuum Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.