Piping: Body Ported/Common SUP Common EXH, Stations: 4 Stations, A, B Port: -
Piping: Body Ported/Common SUP Common EXH, Stations: 4 Stations, A, B Port: -
Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: Body Ported, Stations: 4 Stations, Port Size: -, Thread: -
Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 4 Stations, A, B Port: -, Q: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 4 Stations, A B Port Size: -, P R Port Thread: -
Piping: Body Ported/Common SUP Common EXH, Stations: 4 Stations, A B Port Size: -
Piping: Common SUP/Common EXH, Stations: 4 Stations, Bracket: -, Thread: -, CE Approval: -
Piping: Body Ported, Stations: 4 Stations, A, B Port: -
mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Horizontal specification Maximum speed 1000 600 500 930 740 20 mm Lead 100W mm/s 500 Slide screw 20 mm Lead 180 10 mm Lead Ball screw 100W Nm Rated thrust 90 20 mm Lead 50 Slide screw 20 mm Lead Rolled 0.05 Repeatable positioning accuracy Ball screw Ground 0.02 mm 0.1 Rolled Slide screw Motor output Horizontal specification
Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-
IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane
Refer to Flow Characteristics (page 14-20-38) and figure of Max. Air Flow (page 14-20-38).
(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.
110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24
For details, refer to pages 3-7-19 and 3-7-20.
Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.
20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(
IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded
110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27
For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.