Series VQ Base Mounted Metal Seal/Rubber Seal

(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Modular F.R.L. Unit

tube) Product name plate, Pressure gauge display units: PSI, F Applicable models AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 10 20 30 40 50 60 M5 1/8 3/8 1/2 3/4 1 Thread type AL20 Port size Metric thread (M5) Rc NPT G Symbol Nil Nil M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Note) N F Accessory When more than

Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

Air Cylinder

With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

C3 C4 C6 M5 With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Without One-touch fitting (With clip) F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J/S kit for 2 to 12 stations/Double wiring P/J/S kit for 13 to 24 stations/Double

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

C3 C4 C6 M5 With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Without One-touch fitting (With clip) F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J/S kit for 2 to 12 stations/Double wiring P/J/S kit for 13 to 24 stations/Double

ZX

port M5 (or M6) (PV port) Vacuum supply pressure port M5 (or M6) (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket B : For mounting spacer 13-2-44 44 Vacuum Module: Vacuum Pump System Series ZX Suction Filter Unit: ZX1-F Refer to page 13-2-12 for details.

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

CQ2

Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52

ZP3

Form w 1 Material e Connection thread N S U F GN GS ZP3 T 04 06 08 B A5 1.82 Construction p. 160 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates the minimum hole size of the adapter or vacuum pad Adapter Assembly p. 162 04 ZP3 B T N B5 M5 x 0.8 Width across flats 7 w q e Connection thread (Female thread) 5 B5 M5 x

0.4

P/T kit 2 to 24 stations C8 (8) F kitD-sub connector P kitFlat ribbon cable T kitTerminal block box L kitLead wire S kitSerial transmission C3 (3.2) 643 (Single) 754 (Double, 3-position) Option: Direct EXH outlet with built-in silencer VQ100 C4(4) S kit 2 to 16 stations VQ1000 VV5Q11Side VQ101 C6 (6) L kit 1 to 8 stations M5 (M5 thread) F/P kit 2 to 24 stations F kitD-sub connector P kitFlat

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

ISO Cylinder

H S + Stroke F Rail mounting (A) Band mounting (B) Without magnet ZZ + Stroke With rod boot (Wh) Width across flats K 8 8 l C e (JH) h AM f KK (JW) Dimensions [mm] Bore size AM BE C EE F G1 G2 H (HR) K KK KV KW NA ND S SW (WH) ZZ 8 12 M12 x 1.25 4 M5 x 0.8 12 7 5 28 13.4 M4 x 0.7 19 6 15 12 46 7 16 86 10 12 M12 x 1.25 4 M5 x 0.8 12 7 5 28 14.2 M4 x 0.7 19 6 15 12 46 7 16 86 12 16 M16 x

CJ2

WA S NN NA MM GA LZ LY LX LT LH LC LB H F Z D Y B A WW X Bore size (mm) 10 16 66 M8 x 1.0 21 M4 x 0.7 7.5 32 16.5 24 1.6 9 4.5 16.5 28 8 122 4 7 15 5 15 4.5 14.5 67 M10 x 1.0 21 M5 x 0.8 7.5 42 25 33 2.3 14 5.5 23 28 8 123 5 9 18.3 6 15 5.5 14.5 6-3-53 54 54 Series CJ2ZW Flange Style (F) CJ2ZWF Bore size Stroke Mounting nut 2-FC Mounting hole Cover surface Piping port M5 x 0.8 B 0 0.3 S

Stability of suction position,

x 1 M5 x 0.8/ Effective thread depth 5 M10 x 1 M5 x 0.8/ Effective thread depth 5 9.5 9.5 9.5 M10 x 1 15 44.6 14.5 44.1 Seal washer Seal washer Seal washer 26.5 3 40 31 31 26 2 26 2.5 Width across flats 6 35 32 6 43 40 6 Width across flats 6 53 50 6 Width across flats 6 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/

MXQ

end) 14 6.5 F 4-M5 x 0.8 thread depth 7 49 3.5 1 14.5 28 24.5 24.5 29 24 58 Retraction end adjuster 6 N-M5 x 0.8 thread depth 6 11 5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA

MY1

x L M F x L M F x L F F L L L 90 Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1MW/CW How to Order MY1 M W 25 300 A93 Number of auto switches Guide type 2 pcs. 1 pc.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lightweight: Max. 21 g lighter (When an M5 female thread is used.) ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) ZSE20(F)/ISE20 M5 female thread ZSE30A(F)/ISE30A M5 female thread Improved Installability Enclosure Grommet type Connector type Wiring is possible after piping has been connected.

Proposals for Energy Saving

VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5