REC

24 21 22 41 14 32 16 12.5 50 8 10 56 7 26.5 51 181 247 REC L/Axial foot G H F G Width across flats B2 2-Rc(PT)P K A lNA F AL 2-NN Relieving port M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving port D C B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5

Cylinder with Lock

. 33 Lock Unit MWB-UT Series Dimensions Basic: MWBBm-UT-m MWB MWBW MWB-UT Model Selection Double Acting, Single Rod Double Acting, Double Rod Lock Unit GA GC (Rc, NPT, G) BP Unlocked when pressurized GC GF (Rc, NPT, G) BP GA Manual lock release bolt Width across flats KC 32 only 2 x 4 x J Thread depth MC V B C With rod BH2 BH1 BH3 E E C (BY) C B C L BZ BN F BY F [mm] Model Applicable rod

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

CNS

Long stroke RLQ Rc BQ plug with breathing hole BC element 4-J CL 2-MA Thread effective depth R MLU AL FA A K H GA F GB Rc BP Unlocking port GR GL T G G 2-Rc P Cylinder port (For NPT port) MM ML1C Q DD EA RY E LY LH V -X 4-LD Width across flats KA 20VA BN S + Stroke N RT N X X Y Y LT LX C B Data LS + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA

PSxx-OMT0001CN

) EH5 kPa EH5 kPa EPL:25kPa EPH:50kPa -46No.PS-OMT0001CN-E 4 (1)(100 kPa200 kPa) (2) () (1) OUT1 (2) OUT1 1 () (3) OUT2 (4) [F 2](52 ) OUT [EPH] OUT [EPL] (5) -47No.PS-OMT0001CN-E 4 2 [F 0] [F] 2 [Function ][]] F 0(Unit) [ PA] kPa 49 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 50 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF out2[ Ewin] OUT 2ot[ 2_P] F 2

Direct Solenoid

NPTF PO RTS) INCLUDES 1-Elock XT01&2 4-Soc Hd S..ews NxT02G10 11l4.2Ot2\ 2-Flush Plugs 3/8 " NPT Porl Felocalion Block DIMENSIONS DIMENSIONS A B c D E F G H 1.47 137) 1.36 (34.5) 0.87 4 (22.2:) 1 . 1 0 127.91 0.51 112.9) 0.43i1 (10.9) o.42 110.4 0.31 (7,9) Millimeters in Parentheses A B c D E F G H '1.75 144.4) 1.25 (31.7) 0.995 (25.3) 1 . 1 4 (28.9) 0.75 (19.1) (16.0) 0.47 0.19) 0.56 ('t4.21

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

PSxx-OMR0001CN

[ oFF] 57 -46No.PS-OMR0001CN-J 4 [F 0] M 2 [F 0] [Unit][] kPa Bar PSI 2 -47No.PS-OMR0001CN-J 4 [F 1] P_1 H_1 ISA3-F ON () OFF () () () ISA3-G ON () OFF () () () ISA3-H ON () OFF () () () ON() OFF() -48No.PS-OMR0001CN-J 4 2 [F 0] [F 1] [oUt1][HYS] P_1 H_1 ON ON OFF OFF 2 1 () -49No.PS-OMR0001CN-J 4 [F 2] -50No.PS-OMR0001CN-J 4 [F 6] 20R.D. 2 [F 0] [F 6] [FSt][

PFxx-OMJ0005CN

8 () Rc Rc NPT 1/8 NPT 1/4 G G 6 1/4 (5/32") (5/16") 1/8 1/4 1/8 1/4 95 g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750

CJ2

4 !

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Air Pilot Operated Series NVSA

2 3 4 6 f I I t0 (87) 4.92 (125) 6.42 (163) 7.91 (201) 9.41 (239) 10.91 (277) 12.40 (315) 13.90 (35iD 15.39 (391) 3.94 (1m) 5.43 (138) 6.gl (176) Lili) (214t 9.92 (2521 't1.42 (290) 12.91 (328) 14.41 (366) 15.91 (404) Mlmeters in Parentheses DIRECTIONAL AIB VALVE SERIES NVSA 4@14 AIR PILOT OPERATED ANSI Symbol NVSA 4214 NVSA 4114 NVSA 4314 NVSA 4514 g Y ) \ \ l i / E_l\ \ t/ /, -4 DESIGNJ

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

SV

fitting for 6 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 Rc 1/4 Rc3/8 G 1/4 G 3/8 A, B ports mixed One-touch fitting for 1/8" One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" One-touch fitting for 1/4" One-touch fitting for

reduces flow setting time

4 !6 !7 !5 r !8 !4 !6 !7 !5 !1 AS-F AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.

Pneumatic Transfer System Series MF

C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581