Compact Cylinder Series NCQ8

1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #6-32UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4 4-1/2 5 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-

REA/REB

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

VQ5000

VQ 5 0 1 0 5 Individual terminal block kit Series VV5Q51-0503T1 1 set VQ5100-5 2 sets VQ5200-5 2 sets VQ5300-5 1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve no. (Stations 3 and 4) Valve part no.

Modular Design with Uniform Body Style

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size*1 [AR] 1/8 Fluid Air Ambient and fluid temperatures*2 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Auto drain minimum operating pressure N.C.

CY1

5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Modular F.R.L. Unit

1/8 1/4 1/4 3/8 1/4 3/8 Note 1) Pressure gauge port size 1/16 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Set pressure range 0.05 to 0.7MPa 0.05 to 0.85MPa Relief pressure Set pressure + 0.05MPa Note 2) [at relief flow rate of 0.1L/min (ANR)] Ambient and fluid temperature 5 to 60C (with no freezing) Nominal filtration rating 5m Recommended

MGP

40 5 32 1 32 1 10 50 100 200 0.2 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 7 Series MGP Compact Guide Cylinder Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20 Load weight m (kg) Load weight m (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12

Solid State Auto Switches

With Pre-wired Connector 1 Eliminates the harnessing work by cable with connector specifications Adopts global standardized connector (IEC947-5-2) IP67 construction How to Order Connector Specifications D M9N S A PC Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 3 4 Solid state auto switch Standard part no. For the applicable auto switch model, refer to the table below.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) Made to Order Made to Order (For details, refer to page 411.)

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Applicable Auto Switch Model

Note 1) Refer to common specifications on p.5.3-5.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Vacuum Unit

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.

Plug-in Unit

input no. 1, 3, 5, 7.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

1 !4 u !0 !2 i !3 o !4 !0 !1 !5 !6 Component Parts Component Parts No.