7.5

C N C N For junction common Lead wire length How to Order Indicate the part no. of the connector assembly for the manifold and solenoid valve.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

10112122Rubber bumper GB GC GA NN MM Mounting nut Relief port M5 x 0.8 Rod end nut NN Cover surface Piping port 2 x M5 x 0.8 C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + Stroke S + Stroke NB H NA F A FT F (mm) FZ 42 42 FY 20 20 FX 33 33 FT 2.3 2.3 FC 5.5 5.5 17.5 19 FB 11 11 GC 17 20 C 15 18.3 B 90 91 Z 54 55 S 9.5 9.5 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 NN M4 x 0.7 M5 x 0.8

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

LX

to Cross section C-C.

NCG/CG1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, D C 7 3 ( C ) / C 8 0 C , D A 7 3 ( C ) ( H ) / A80C, D-A53/A54, D-Z73, D-90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

LX

to Cross section C-C.

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

REA/REB

REAH20 REAH25 42 19 M5 x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97 26.5 21 50 8 23.5 M5 x 0.8 48.5 75.5 108 53 16 M5 x 0.8 41.5 22 54 42.5 26.5 102.5 58.5 28 M6 x 1.0 10 86 138 56 M6 x 1.0 25 46 46 61.5 63 125 29 24 TW S XB Z ZZ W PA PB PP P Model N NL NT REAH15 REAH20 REAH25 161 65 17.5 194 21 88.5 62 8 M5 x 0.8 50 15 16.5 70 169 92.5 205 19.5 50 65 23 Rc 1/8 18 15 8 209 75 23.5

REA/REB

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Sysytem Figure Silencer System Solenoid valve Speed controller 4 X M5 6 X M5 6 X 1/8 6 X M5 AS1301F-M5-04 A SYJ3000 M5 X 0.8 (S = 1.8mm2) AS1301F-M5-06 B q AN120-M5 (S=5mm2) AS2301F-01-06 C 6 X M5 AS2001F-06 D w 1.2-9 Series SYJ3000 How to Order Bracket Light and surge voltage suppressor Configuration S Z R U Without light and surge suppressor With surge suppressor With light

LJ1H

B C D A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

SYJ300/500/700

area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M5 x 0.8 M3 x 0.5 1.5 0.17 0.36 0.3 0.17 Type SS3YJ3-42-M5 Base mounted for internal pilot 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note1) C kit only.

0.4

N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

0.

-PR M5 x 0.8 (X: External pilot port) M5 x 0.8 [1(P), 3(R) port] M5 x 0.8 [2(A) port] 1 P 3 R 10 10.7 9 32 30.2 Note) For one-touch fittings for P/R port and silencer part no., refer to back page 4.