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ON OFF 2 3 4 6 1 2 4 8 5 10 0.5 ON:SEC OFF:MIN 0.5 IDFA100F150F 4 4 4.2 IDX-OM-U022 5. 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDFA100F150F 5 1 5.1 IDX-OM-U022 5. ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 INOUT INOUT () IDFA100F150F 5 2 5.1 IDX-OM-U022 5. 5.2 1-3 5.1 3.7 OFF () ON OFF ON IDFA100F150F 5 3 5.2 IDX-OM-U022 5. 5.3 R () OFF OFF OFF ON

The maximum pressure can be set as low as 10% and as high as 100% of the full span. For example, an ITV203 could be set to output 35 PSI at 0% input signal, and 43 PSI at 100% input signal (there must be at least 8 PSI separation).

(mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

(MQQL/MQML) Series Variations Series MQQ Compact low friction cylinders designed for low pressure, low speed, uniform speed or low friction applications Series Bore size (mm) Stroke (mm) Operating pressure range (MPa) Actuation speed (mm/s) 10 20 30 40 50 60 75 100 10 16 20 25 30 40 MQQT Standard type 0.005 to 0.5 0.3 to 300 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to

Cylinder ports should be NAMUR hole pattern. 100/200 V (50/60 Hz) 24 V 15 to +10% of rated voltage Class B or equivalent 5.0 VA/60 Hz, 5.6 VA/50 Hz 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz 1.8 W Grommet, Grommet terminal, Conduit terminal, DIN terminal Note 1) Use dry-air at low temperature. Note 2) Use turbine oil Class1 (ISO VG32), if lubricated.

Allowable moment (Nm) Load weight (kg) m3 40 20 30 20 10 10 0 0 16 25 40 16 25 40 Bore (mm) Bore (mm) MY2C MY1C MY2C MY1C 2 Magnetically Coupled Rodless Cylinder/Low Profile Series CY1F Compact Max. 29% reduction in height (mm) Height Series 10 15 25 CY1F 28 34 46 46 63 CY1H 39.5 CY1H CY1F Short body Max. 31% reduction in overall length Reduction in length is 22% over MY2H cylinder CY1F

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 15 1000 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 25 12-CY3B25 (Both sides) Non-lube 32 12-CY3B32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250

Consult factory for strokes less than 10mm. 6.1 16 External Feedback Lever (IP6000 type) Stroke Order Code Unit Number Size M Size N P368010-20 5 9/10" 4 9/10" 10~85 mm (Nil) 5 M N P368010-21 7 2/3" 4 1/3" 35~100 mm (E) P368010-22 10 4/5" 4 1/3" 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 6 0 0 0 / I P 6 1 0 0 IP6000 TYPE: LEVER TYPE FEEDBACKNO TERMINAL BOX (FM Model) IP6000 TYPE:

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

(Values at the initial period) Solenoid Specifications Electrical entry Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 12, 24 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz 3.5 VA/50 Hz, 3.3 VA/60 Hz 3 VA/50 Hz, 2.8 VA/60 Hz 4 W (Standard), 2 W (Low power consumption type) 4.3 W (Standard), 2.3 W (Low power consumption type) Varistor Diode (Varistor for 12 VDC

rate (l/min (ANR)) 1.5 3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 Flow rate (l/min (ANR)) 20 Flow rate (l/min (ANR)) 10,11 12

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Manifold base Individual port Rc Applicable valve Base weight (g) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Construction/ Principal Parts Material 1/8 1/4 1/8 1/4 VXA31 5-00 n x 100 + 50 VXA32 5-00 n x 160 + 70 Model/Valve Specifications Av x 10 -6 (m 2) Cv converted C [dm 3/(sbar)] b Cv Oil Air Flow characteristics Max. operating pressure differential (MPa) Orifice

10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789