RS2H-OM0045P

A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm D-A9(V):0.100.20Nm D-M9(V):0.050.15Nm 90 7-3-2.D-P3DW M2.5X9.5L1 2 M2.56L

Title not found

Double acting PA PA B A PB B A With by-pass Suck back valve Manual Operation-Series LVH N.C. Double acting P PA PA Locking and non-locking types available B A B A PB B A Integral fitting type/Threaded type Manifolds Main applications and fields For shut off For air bleeding N.C.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

D-M9(V) D-M9W(V) D-M9A(V) Auto switch mounting bracket part no.

Low Maintenance Filter Series FN1

Description Material 1 2 3 Stainless steel SUS304 Cover 4 EZH710AS-149 Stainless steel SUS304 Element Stainless steel SUS304 Bowl JIS B 2401-1A-P185 NBR Stainless steel SUS304 V-band 5 O-ring FPM JIS B 2401-4D-P185 Note Replacement parts No. Description Material NBR JIS B 2401-1A-P85 4 O-ring FPM JIS B 2401-4D-P85 9

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B B B B 19 P 40 39 P 35 A A A A A 19 2 MAX.5 10 10 (Lead wire length) G : About 300 H : About 600 24.5 (Pitch) P=10.5 10.5 (Mounting holes) L2 4 L1 (Non-locking) Manual override A A 20 48.5 [55] 15 B B 5 36.1 1.5 29.5 A A (Pitch) P=10.5 17.5 2n-One-touch fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.

AR20-B to AR60-B

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

VQ7-6/7-8

B) 2 FJG Option 1 (P) 5 (R1) 3 (R2) None Light/Surge voltage suppressor Individual pilot exhaust Nil Z V (A) 4 (B) 2 When two or more symbols are specified, indicate them alphabetically.

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 43.9 24 24 44 23 A A A A A 10.5 0.5 (DIN 1.7) 33 10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Code Unit psig/bar MPa B V C V No code MPA 4P 4PN

CE

phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

RQ

U CU T1 CQS F B E CQM Joint And Mounting Bracket (Type A, Type B) Part No.

High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

3

flow ratio to be b = 0.3.

Compact Cylinder with Air Cushion Series RQ

0.093 9 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Simple Joint/32 to 50 A type mounting bracket 2-D T2 M W V U T1 Joint and mounting bracket (A type, B type) part numbers F B E YA 03 Applicable air cylinder bore size mm 03 05 32, 40 50 Bore size (mm) B D E F M T1 T2 Part no.

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

PFG3x.eng

PNP open collector 2 output + Analogue output Max. 80 mA Residual voltage: 1.5 V or less Bracket A (Part No.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Guide Table Series MGF

+ Stroke Dimensions (mm) A B GB Bore size 40 63 100 58 48.5 36.5 GB 73 61.5 38 78 66.5 38 Dimensions not listed above are the same as the standard model.