KR

12.8 13.9 11.0 8 KGLU08-00 15.2 26.3 18.2 15 KGLU10-00 18.5 40.8 29.0 25 10.4 12.8 15.2 18.5 20.9 T VMG KGLU12-00 20.9 57.2 45.2 32 12 Note) D: Max. diameter 3-applicable tubing Plug-in Elbow: KGL Effective area (mm2) Urethane Nylon Applicable tube O.D. mm Applicable fitting size d Note) D2 M Weight (g) L1 L2 A D1 Model Applicable tubing KGL04-99 8 10 12 6 4 6 4 18 20 22.5 25 27.5 31.5 14.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

e-Rodless Actuator

Auto Switches/Proper Mounting Position at Stroke End Detection B A (mm) D-A9, D-A9V (mm) D-M9, D-M9V (mm) D-F9W, D-F9WV A A A B B B Operating range Operating range Operating range Nominal size 16 25 Nominal size 16 25 Nominal size 16 25 3 44 116 48 112 48 112 8 8.5 3.5 54 156 58 152 58 152 Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators switch

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

KJ

d (inch) Applicable tubing O.D.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, D-F9WV D-M9 , D-F9W D-A9V D-F9V D-M9N B P D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

Low Profile Guide Type

(mm) D-M9V D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A90V D-A96V D-A93V Bore size (mm) D-A90 D-A96 D-A93 D-M9 D-M9W Bore size (mm) Mounting pattern q, w Mounting pattern e 32 32 20 22 35 20 10 15 25 12 5 10 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

RSQ

D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18

Table of Contents

C D E F Dimensions Part no.

48

A Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV A B 12 (10 x 2) 10.0 2.5 16 (12 x 2) 10.0 2.5 20 (16 x 2) 9.5 6.0 25 (20 x 2) 9.5 6.5 32 (25 x 2) 9.5 8.5 40 (32 x 2) 8.5 16.5 50 (40 x 2) 8.5 23.0 63 (45 x 2) 8.5 27.5 80 (56 x 2) 8.5 41.5 100 (71 x 2) 7.5 46.5 Auto switch model Auto switch model D-M9V D-M9WV D-M9AV Bore size

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Solid State Auto Switches

HW H H' T' Z Auto switch model D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 69 77 91 107 121 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 6.5 6.5 7.5 9.5 9.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2

High Power Cylinder:

D-B5 D-B6 D-A3l D-A44 D-G39 D-K39 D-B59W D-C7 D-C8 D-H7l D-H7lW D-H7lF D-H7BAL D-B5/B6 D-B59W D-G5NTL D-A3l D-G39 D-K39 D-A44 D-C73C D-C80C Bore size (mm) A B A B A B A B A B A B A B HS HS HS HS HS 20 20.6 9 14.6 8.5 14.1 14 10.5 16.1 12.5 18.1 11.9 17.5 19.6 15 24.5 27.3 62 69.7 27 25 20.6 9 14.6 8.5 14.1 14 19.6 10.5 16.1 12.5 18.1 11.9 17.5 15 27 29.8 64.5 72.2 29.5 32 22.6 8.9 16.6 8.4

Compact Guide Cylinder

A Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV A B 12 (10 x 2) 10.0 2.5 16 (12 x 2) 10.0 2.5 20 (16 x 2) 9.5 6.0 25 (20 x 2) 9.5 6.5 32 (25 x 2) 9.5 8.5 40 (32 x 2) 8.5 16.5 50 (40 x 2) 8.5 23.0 63 (45 x 2) 8.5 27.5 80 (56 x 2) 8.5 41.5 100 (71 x 2) 7.5 46.5 Auto switch model Auto switch model D-M9V D-M9WV D-M9AV Bore size

Environment

Applied portion Order no. 21 25 LE-D-2-2 32 LE-D-2-3 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) * Apply grease on the piston rod periodically.

Pin Clamp Cylinders

D-M9B SMC D-M9B SMC For D-P4DW D-M9V D-M9WV D-A9V 28 Note) Allow 35 mm or more space at the cylinder head side to secure the minimum bending radius of the auto switch lead wire. 544 Auto Switch Mounting C(L)KQG32 Series Auto Switch Mounting Bracket Part No.

CE

. 10-12-25 25 Series CE1 Proper Auto Switch Mounting Position (Detection at stroke end) Auto switch A B Proper Auto Switch Mounting Position D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BAL D-F7BAVL/F79F Auto switch model D-A79W D-F7NTL D-A7 D-A80 D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5

CE

. 10-12-25 25 Series CE1 Proper Auto Switch Mounting Position (Detection at stroke end) Auto switch A B Proper Auto Switch Mounting Position D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BAL D-F7BAVL/F79F Auto switch model D-A79W D-F7NTL D-A7 D-A80 D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

SX

Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.