SMC Corporation of America
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D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

y y e r u r u Drain Drain Component Parts No.

y y e r u r u Drain Drain Component Parts No.

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

The end angular speed is obtained by: t Table 9 Allowable kinetic energy (J) Size Allowable kinetic energy : Rotation angle [ rad ] : Rotation time [ s ] 1 0.001 Kinetic energy E is obtained by: 2 0.0015 3 0.002 7 0.006 E Therefore, the rotary table rotation time is: E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] During uniform acceleration, the

Vertical line of belt teeth Flaw, which is made when the belt runs on the flange. e. Rubber back of the belt is softened and sticky. f. Crack on the back of the belt -26- 3.5 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1.

e. f. -37- 6.5 (LEFBLEFS -(A) (-(B)) A B LEF16 M2.5x5 LEF16 M2.5x16 LEF25 M3x6 LEF25 M3x20 LEF32 M3x6 LEF32 M4x30 LEFS40 M3x6 LEFS40 M4x35 -38- 7. No. 1) 1 / /P30 4.

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification 1.1 How to Order L E K F S 32 E A 300 R1 CD17T Motor type Size Motor mounting position Lead[mm] 16 25 32 40 Nil In-line Size E Battery-less Absolute Symbol R Right side parallel 16 25 32 40 (Step Motor 24VDC) L Left side parallel H 20 24 30

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 X 0.45 X 25 l M3 X 0.5 X 30 l M5 X 0.8 X 40 l Pulling force 4.9N 10N 24.5N Stroke (mm) 2 3 3 e Release lock when mounting or adjusting the cylinder. If mounting is done with lock engaged, lock mechanism may be damaged. * Remove bolt under normal operations.

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

L L+A Fig. 1 Fig. 2 L 2 1 V E = W ( ) 2 1000 Collision speed V = 1.4 Va Find the kinetic energy E (J) of the load. 1 420 E = 1 ( ) = 0.088 2 1000 V = 1.4 x 300 = 420 Correction factor (reference value) Find the allowable kinetic energy Ea (J).

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.