High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

IDX-OM-W028

IDU Series 10-1 Safety instructions 10 1 IDX-OM-W028 Air Dryer 10 Specification for Option R IDU22E75E-23 IDU22E75E-30 Customer connection side Tightening torque : M5 (2.6Nm) Connector width : 9.5mm or less Applicable electrical wire1.25mm2 or more Customer connection side Tightening torque : M5 (2.6Nm) Connector width : 9.5mm or less Applicable electrical wire1.25mm2 or more L01,L02,L03

CLK1

Step 3) Screw in the accessory unlocking bolt (hexagon socket headcap screw 32: M3 x 8l, 40: M4 x 8l, 50: M4 x 8l, 63: M5 x 10l). 1. Piping port position, switch rail position, and by-pass piping position can be selected by the part number. However, if there is an error in ordering and changes to the positions are required, please note the following. a.

AMPSeries

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

AMP

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

F 4 T 10 9 Silencer box 2(B), 4(A) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .57320

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .25269

VER2000/4000

6 q w e r t y u i Block packing !

Table of Contents - Tubing

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

VFM300

0 w e Valve Valve spring Return spring Spool spring Head cover r Spool valve assembly NBR ZDC !1 Stainless steel t ADC End cover Metallic plated !2 Stainless steel y POM Piston !

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

10-SYJ3000

locking slotted type Coil type M5: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

Exhaust Cleaner for Clean Rooms AMP Series

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .22046

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT Weight: tab 9

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT Weight: tab 9

IDX-OM-W026

F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI

IDX-OM-W029

GFCI 5. 6. 7. 10-2 IDU22E/37E/55E-23-R 10A 30mA IDU75E-23-R 20A 30mA IDU22E/37E/55E-30-R 10A 30mA IDU75E-30-R 15A 30mA IDU Series 10-1 10 1 IDX-OM-W029 10 R 10-3 1) 2) 3) M5 9.5mm 2 1.25mm N L L ,N () 6.5mm () Connect to earth cable GFCI Connector width AC230V 6.5mm or less M5 Electrical entry 9.5mm 2 1.25mm L01,L02,L03 L01 L02 L03 L1 L2 PE L3 () M3 () 6.5mm

Digital Pressure Switch

E Error indication With the self-diagnostic function of the Pressure switch, this indicates that there is an error which could cause a switch failure. F Fine adjustment mode Refer to "Fine adjustment of display value". A displayed pressure value can be adjusted within the range of 5%R.D. (5% of the displayed value).