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Contact P/A. DC(+) Sensor input: DC+ 1 to 5V CH3_OUT1 (Orange) DC() N.C. CH4_OUT1 (Pink) DC(+) Internal data error. Sensor input: DC+ 1 to 5V Load Load Load Load Load DC() DC() (Blue) N.C. Shut off the power supply and turn it back on. Contact P/A if it does not recover. Internal data error.

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

Over current is flowing to the load of a switch output. Internal data error. Contact P/A. Internal data error. Internal data error. Internal data error. Shut off the power supply and then reset the switch. Internal data error. Use an adjustment valve, etc. to reduce the flow rate until it is within the flow rate range.

S. consi st s of 12 bi t s, t o t he E/P regul at or t hrough m ast er PLC( i nput t i ng t arget val ue t o 0 area) . a f orm ul a> Set pressure / F. S. pressure range x 4095 The val ue obt ai ned by t hi s f orm ul a i s convert ed t o a hexadeci m al num ber f or sendi ng.

Fully open P A control P A control F.R.L. 2 port 3 port Flow rate AV Closed Current A R control Effective area (mm2) AU Effective area (mm2) AF Fully open AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX AMR ITV IC Current A Current A VBA F1 solenoid F2

T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 77 96.5 116 63 80 100 20 25 30 10 12 15 39 45.5 55.5 103 121.5

Caution Operation instructions Consult P/A when using solvents other than water.

P/N 3/8 B5 x 2 3/8 B5 x 3 3/8 B5 x 4 3/8 B3 x 2 #2 1/2 Barb P/N 3/8 B2 1/2 x 2 3/8 B2 1/2 x 3 3/8 B2 1/2 x 4 3/8 B2 1/2 x 5 3/8 B2 1/2 x 6 3/8 B2 1/2 x 7 #3 Barb P/N 3/8 B3 x 2 3/8 B3 x 3 3/8 B3 x 4 3/8 B3 x 5 3/8 B3 x 6 #4 Barb P/N 3/8 B4 x 2 3/8 B4 x 3 3/8 B4 x 4 3/8 B4 x 5 Thread Size 1 Barb # (Size) Quantity of Barbs Part Numbering Example 52 Available with #1, #2, #2

Male elbow Bulkhead union P. 104 DL Use to pipe at right angle to female thread portion. Most general type. P. 105 DE Use to junction connection of tubes for panel. Union tee Bulkhead connector P. 104 DT Use to branch connection of tubes of both sides 90 direction. P. 105 DEF Use for transit connection of a tube and a male screw on panel.

With a model that has the maximum flow rate line below the obtained intersecting point, the flow rate will be exceeded, thus leading to a problem such as being unable to satisfy the specifications. AFF AMl Related poroducts 4.6-28 Series AMF Flow Characteristics/Refer to How to Select p.4.6-28 regarding model selection.

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

MS-5ALHU-3 MS-5P H/DL L/LL For polyurethane tube 3.18/2 x M5 P.339 KC Extention fitting Solid piece moves fitting up from work piece M5 male x M5 female 4/2.5 x M5 MS-5J MS-5ALHU-4 KK For soft nylon and polyurethane tube P.339 KK130 Nipple Fitting to workpiece and fitting to fitting connection M5 male x M5 male 6/4 x M5 MS-5N MS-5ALHU-6 DM P.338 P.339 KDM Universal nipple Hose nipple Body

IN High pressure IN Low pressure IN P IN P OUT OUT OUT IN High pressure IN Low pressure OUT IN P IN P JIS symbol JIS symbol IN P OUT IN P SMC Pneumatics, Inc.

Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

A fitting with an O-ring is used for a high vacuum rodless cylinder. Use a fitting that conforms to the dimensions below, and install it so that there is no air leakage. P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1.

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.