Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

Body Ported RoHS How to Order Valve VF 3 1 3 0 5 G 1 01 Body ported Series 1 3 5 Bracket VF1000 VF3000 VF5000 Type of actuation Nil F Without bracket With bracket Thread type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center Rc G NPT NPTF Nil F N T VF1000/3000 Single type (The bracket cannot be connected after delivered

Pressure Control Valve AP100

.: B21-1P 0.12 How to Order AP100 01 Cylinder cushion Application Example Special specifications Pressure control valve Thread type Symbol Nil Specifications Symbol Nil N F Type Rc NPT G Set pressure range 0.02 to 0.2 MPa X201 AP100 Accessory Connection thread Symbol Nil B Description With bracket Symbol 01 02 Size 1/8 1/4 Precautions Relief Characteristics Do not use this product as a

Manifold Regulator Modular Type ARM2500/3000 Series

GA33-10-01 Outlet pressure (MPa) ARJ AR425 to 935 ARX Width across flats 10 AMR ARM ARM Note 1) in the gauge part no.

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VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEC-CK4-1: 1.5m LEC-CK4-3: 3m LEC-CK4-5: 5m (2) Derails of input / Output signal Insulation color Dot Mark Dot color Function Contents T erminal No. 1 Light brown Black COM+ Connect the 24 V side of the power supply (24 VDC) for input / output signal. 2 Light brown Red COMConnect the 0 V side of the power supply (24 VDC) for input / output signal.

VQZ100V-OMT0001

(V (V (V ) ) ) ) 020[V] 5.0 20[V]30[V] 100 2)UL1310 2 UL1585 2 30Vrms(42.4V ) (2 ) EMC EMC EMC EMC GW GW GW GW GW GW GW GW 0V 0V 0V 0V 12 No.VQZ100V-OMT0001 VQZ Series/ / / / SI SI SI SI SI () ( ) CE CE CE CE , , , , SI ( ) SI 13 No.VQZ100V-OMT0001 VQZ Series/ / / / SI ( ( ( ( ) ) ) ) 14 No.VQZ100V-OMT0001 ( ?

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x

MGF

40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places) 73 146

Parallel Style Air Gripper: Wide Type Series MHL2

D-M9(V) D-M9W(V) D-M9A(V)L Auto switch mounting bracket part no. 0.6 0.5 BMG2-012 0.9 0.5 Auto Switch Mounting Brackets: Precautions When auto switch is set on the mounting side as shown below, allow at least 2 mm run off space on mounting plate since the auto switch is protruded from the gripper edge.

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Guide Table Series MGF

40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146

Series 11-MXJ Air Slide Table

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 3 (L) Applicable load AC DC 12 V In-line A93 Reed auto switch 2-wire Grommet Yes 24 V 100 V Relay, PLC M9N 3-wire (NPN) 12 V Solid state auto switch Grommet Yes 24 V Relay, PLC M9B 2-wire 12 V Lead wire length symbols 0.5 mNil

Coolant Valve

200 V, Other voltage (Option) Coil rated voltage (V) VNB Pressure VNC2 24 V, Other voltage (Option) 15% to +10% of rated voltage External pilot air 0.1 + 0.25 x (Operating pressure) to 0.7 MPa Refer to Graph (1).

MRHQ

12 V IC circuit Grommet Solid state switch Relay PLC M9PV Yes 24 V 3-wire (PNP) M9BV 12 V 2-wire Lead wire length symbols: 0.5 m .

XLAQ/XLDQ

A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less

C95

switch Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL IC IC 3-wire 5 V Yes AC 100 100 V or less 12 V 5 V, 12 V Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (2

Fieldbus system Digital unit

2 Output 4 2 3 0 V (Output) 24 V (Output) 4 Output 5 1 0 V (Output) 24 V (Output) 2 Output 6 3 3 0 V (Output) 24 V (Output) 4 Output 7 1 0 V (Output) 24 V (Output) 2 Output 8 4 3 0 V (Output) 24 V (Output) 4 Output 9 1 0 V (Output) 24 V (Output) 2 Output 10 5 3 0 V (Output) 24 V (Output) 4 Output 11 1 0 V (Output) 24 V (Output) 2 Output 12 6 3 0 V (Output) 24 V (Output) 4 Output 13 1 0 V

Series CE1

A76H 5V A96 A96V IC V V A72H A73H A72 A73 200V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V Grommet Yes Reed switch Solid state switch V 100V 12V A93 A90 A93V A90V Relay PLC 2 wire A80H A80 A73C A80C A79W F7NV IC No Yes No Yes 5V,12V 100V 24V 24V 12V V V V V Connector IC 5V,12V Diagnostic indication (2 color) Grommet F79 IC 5V,12V 3 wire (NPN) 3 wire

Refrigerant R134a (HFC) 1E, 2E, 3E, 4E, 6E, 8E, 11E, 15E1 (Inlet air temperature: 35 ° C, Outlet air pressure dew point: 10 ° C) Standard Inlet Air Temperature IDF l E Series

Voltage Symbol Voltage Applicable size 1E 2E 3E 4E 6E 8E 11E 15E1 10 Single-phase 100 VAC (50Hz) 100/110 VAC (60Hz) V V V V V V V V 20 Single-phase 200 VAC (50Hz) 200/220 VAC (60Hz) V V V V V V Options Symbol 1 Nil A C G K L M R S T Power supply terminal block connection (Voltage symbol 10 only) 3 With a terminal block for power supply, operating, and error signals 4 With an earth leakage