11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MXW Order Made Rod Boot Materials Standard Stroke Made to Order Specifications Symbol J K Materials Max. ambient temp. MXP Refer to p.5.4-1 for made to order specifications of series CBA1.

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

MGF

40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places) 73 146

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

MQQ

A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to

VM

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

Rotary One-touch Fittings Series KS/KX

t i f h c u o t e n O d a e r h t e l a m ) T P ( R 3 KM12 5 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 6 8 0 1 KM15 6 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 4 6 Applicable Tube KM16 Tube material Nylon, Soft nylon, Polyurethane KM14 Tube O.D.

Series MXP Precision Air Slide Table

B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M20.4, 3 deep For magnet mounting 2-M30.5, 3.5 deep 8 For rail mounting 10.7 8.5 6-M50.8 20 20 7 deep L (mm) Model G H J K L M S V W Z MXP16-20 18 58 93 40 36 40 20 82 65 102 MXP16-30 28 70 119 50 42 56 30 108 75 128 170 170 Precision Air Slide Table Series MXP Cautions for Auto Switch Mounting Read before use.

Compact Cylinder Series NCQ8

Cylinder tube shape for 0.75, 106 K M1 O-counter bore R depth A + Stroke E 0.13 [0.16] Note 1) 2 sides x 4 places (Inch) C Symbol Bore 1/8"st 1/4"st 3/8" to 4"st A Z W R Q P O N M2 M1 K J I H E D 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.31 0.36 0.46 1.25 0.56 #10-32UNF 1.56 0.06 0.25 0.86 1.22 0.15 0.25 0.19 0.15 1.31 0.38 #10-32UNF 0.50 0.70 0.52 1.56 0.88 5/16-24UNF

Compact Cylinder with Air Cushion Series RQ

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

Guide Table Series MGF

40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146

OMU0023

As this product is a 2-wire type, TXD and RXD are written together as "SD" 4.3 Communication Circuit Exterior Controller's interior 5 [V] RS-485 Driver 47 [k] CN3 680[] SD+ SD680[] GND 47 [k] Note 1) There is no terminating resistor built into the controller communication circuit. 9 - 4.4 Wiring Examples A wiring example of one controller connected to an upper level device is shown below.

PSxx-OML0002CN

) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2 ON/OFF 2 7 "8"7 "-"()7 digit() 1digit=1 kPa 1,2,3,,99,100 1 kPa 1 5[V]F.S.=514[V] 1F.S.40.010.04[V] F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF (29 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () NPN () () ()()( ) () -11No.PS-OML0002CN-G ON ON 0 (1 k