240

2 e w i !1 t !

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Vacuum Pad

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

LX

S Q B CE marking Guide rod type P Actuator configuration Number of auto switches 1 pc. 2 pcs. 1 2 Ball bushing B Guide type 6 pcs. 6 Motor type Auto switch type 2 phase stepper motor 5 phase stepper motor 2 5 Model Wiring/ Output type 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire Lead wire length (m) Contact Symbol F9N F9P F9G F9H

Compact Cylinder Series NCQ8

, 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

2–4

2 !7 !6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

ARM10/11

Handle position 2.

ARM10/11

Handle position 2.

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !

Lubrication Equipment

VBA ALDU900 ALD900 ALDU600 ALD600 126044P VE 113449 (1) 113543 (2) 126130P 126044P 126130P Bracket VY 12651-1P Panel 12661P IS430-1 to 2 Flow switch IS430-1 to 2 IS420-1 to 2 IS420-1 to 2 G Note 1) Bracket for filter mounting: For Rc(PT)11/4 , 11/2 Note 2) Bracket for filter mounting: For Rc(PT)2 Thread machining on filter body is needed.

RB/RBL/RBQ

R 2 mgh F1S m Nm C m/s kg S T t m MK(2) E1 + E2 mgS F1S mgS mgS F1S + mgS RS Q G 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YW QW NW PB PD Q + Stroke PG (2-JJ counterbore, thread depth from bottom KK) Floating bracket mounting thread PC LW 2-P 2-T counterbore depth E H NE NH C NG HG G UU TT A N 2 x 2-P Z + Stroke (Hexagon socket head taper plug) (mm) MM M4 x 0.7 Model MY3A16 MY3A25

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

o @2 i r t !

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Soft Start-up Valve AV2000/3000/4000/5000 1

AL High speed supply 1/2 PP PA PP PA 1 (P) 2 2 (A) 1 Since piston B t holds the fully open condition, during normal operation the cylinders speed will be controlled by the usual meter-out control. Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port.