Fieldbus system EtherNet/IP TM compatible SI unit

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 byte/1 channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 byte/1 channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 byte/1 channel) 4 (2

VS7-6

Blank plate (Air filter, Regulator) Manifold blocks necessary for mounting 2 2 2 2 2 2 2 1 F.

SI Unit for Vacuum Manifold

Product summary 10 2. Wiring 11 2.1. Fieldbus interface connector 11 2.2. Power supply connector 13 2.3. FE terminal 14 3. Configuration 15 3.1. GSD file and symbol file 15 3.2. Head modules 15 3.3. Modules 16 3.4. Sub modules 17 3.5. Configuration steps 18 4. Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

MGZ Series

(different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

JSY1000/3000/5000 Series (Non Plug-in)

Compatible cable Cord O.D.: 3.5 to 7 (Reference) 0.5 , 2-core, or 3-core, equivalent to JIS C 3306 When using other than SMC brand tube, confirm that the following specifications are satisfied with respect to the tube outside diameter tolerance.

SY3000/5000/7000 Series Plug-in Type

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

LA-OMT0056

Safety Instructions . 3 2.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

(Fig. 5-1, Fig. 5-2) Reference: For the bilateral piping type: The full length of the cylinder is shorter than the centralized piping type: Integrated piping is possible. Plate C Plate A Piping Piping Fig.5-1 Bilateral piping type [CY1S] Plate B Plate A Piping Fig,5-2 Centralized piping type [CY1SG] 9/28 3-2) Stopper type Select the stopper from the three types on the right.

IS3000

C. CR N.C. C. IN Ex. 2) When using contact b only LAMP LIGHTS WHEN PRESSURE RISES. N.C. C. CR Caution Component Parts 1. In the case of using a switch with indicator light, wire the indicator light per the following: 2. Please put the enclosed seal of LAMP LIGHTS WHEN PRESSURE RISES. or LAMP GOES OUT WHEN PRESSURE RISES. on the equipment where it is easy to see.

IS3000

C. CR ZSP N.C. C. Ex. 2) When using contact b only IN PS LAMP LIGHTS WHEN PRESSURE RISES. N.C. C. CR Caution ISA No. Component Parts 1. In the case of using a switch with indicator light, wire the indicator light per the following: 2. Please put the enclosed seal of LAMP LIGHTS WHEN PRESSURE RISES. or LAMP GOES OUT WHEN PRESSURE RISES. on the equipment where it is easy to see.

Thermo-chiller

Model HRL100-Am-20 HRL200-Am-20 HRL300-Am-20 CH1 CH2 CH1 CH2 CH1 CH2 Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 1.4 2.2 3.0 Control method PID control Ambient temperature [C] 2 to 45 Circulating uid CH1: Tap water/CH2: Tap water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

2 o !3 y Component Parts No.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Note 2) Value for DC.

3 Port Solenoid Valve Rubber Seal Series SY100

Note 2) Value for DC.

Series SY100 3 Port Solenoid Valve Rubber Seal

Note 2) Value for DC. Add 1g for AC.

Metal One-touch Fittings

(See Fig. 2.)

IMPACT BLOW GUN

L IBG1-12-10-50S 50 IBG1-12-10-100S 100 IBG1-12-10-150S 150 IBG1-12-10-300S 300 Width across flats 17 Width across flats 17 Width across flats 19 Width across flats 19 L + 22 Reference dimension after R thread installation L 7 Chip guard (Please order separately.) 11 Polycarbonate (Transparent) 2 [mm] 26 D Part no.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

16 19 21 16 19 21 15 18 20 16(15) 19(16) 22(18) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29(0.28) 0.24(0.27) 0.23(0.30) 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2(4.0) 4.8(4.5) 5.5(4.8) 1.9 VPA4150 Single 2.7 2 position 1.9 VPA4250 Double 2.7 2.5 Closed center VPA4350 3.3 3 position Exhaust center 2.5 VPA4450 3.3 Note) ( ): Normal position Valve model Function Mass (kg) Effective area

Fieldbus system (SI unit – PROFIBUS DP compatible)

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first. 2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.