)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
changes in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
Vacuum Manifold for fieldbus system N.C. 5 24 VDC E N.O. N.C. (7) Light/surge voltage suppressor and common specification Symbol Light Surge voltage suppressor Polarity U Non-polar (8) Pressure sensor Note 7) Symbol Specification T1 -100 to 100 [kPa] T2 -100 to 200 [kPa] Note 7) When Nil for (4) exhaust sealing valve is selected, T1 is available, when V is selected, T2 is available.
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%
(with no condensation)1000 VAC for 1 minute between terminals and housing50 M7 or more (500 VDC measured via megohmmeter) between terminals and housingCE marking, UL (CSA), RoHSPPS, FKM, CPVCNon-grease25A285 g370 g
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%