3 Port Solenoid Valve Rubber Seal Series SY100

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Parallel Type Air Gripper Series MHZ

H K M Side ported Axial port Side Ported [E] MHZA2-6E MHZAJ2-6E End boss assembly 7.8 20 -0.013 -0.035 8f8 4 5 10 23.7 33.8 12 Specifications and dimensions other than the above are the same as the basic type or the end boss dimensions of the MHZA type.

RSH

W (Diagonal I) (mm) I B GB P QA CD QB CT CZ D E FT FX FZ GA H Stroke A L Bore (mm) N O 1 8 1 4 1 4 50 14 depth 5 85 93 16 10 20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (#1+#5) : RSH Bore size -lll Basic

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

MONOSASHI-KUN WITH BRAKE CONTROLLER

Selection of Dip Switch 10. Driving 45 10-1. Setting of Origin Direction 10-2. Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1.

IC

VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Process Pump

Fluoropolymer Needle Valve Series LVN Specifications LVN20 LVN30 LVN40 Model Orifice diameter 4.4 4, 6 1/8", 3/16", 1/4" Metric Inch 10 10, 12 3/8", 1/2" 8 6, 8, 10 1/4", 3/8" Tube size Refer to Best Pneumatics No. 7 for further details.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

With Factory Installed

When speCllylng mor e than one option, please tisl numerically Ihen atphabetically.

LC6D/LC6C

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

ARJ1020F

IC Electroless nickel plated Dimensions VBA Caution A Model ARJ1020F-M5-04 B 10.4 C 4 D E F G H J K 21 VE 10.6 (Width across flats: 10) 1. Release the lock to adjust the pressure. After the adjustment, engage the lock. Failure to observe this procedure could damage the handle or cause the outlet pressure to fluctuate.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Return Filter FH100 Series

Differential pressure indicator e Seal washer order no.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Clean Air Module

Note) One-touch fitting 10 PB AMG PA 76 37.5 AFF 25 13.2 (47.5) 60 49 (77.5) 25 45 45 AM 349 Note) This port is unavailable.

Vacuum Pad

ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11

Trimmer Auto Switch

Series 10 12 16 20 25 32 40 50 63 80 100 MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 MHZL2 6.0 7.0 10.0 11.0 MHL2 7.0 8.0 8.5 10.5 11.0 12.5 MHS2 6.5 7.0 7.5 8.5 MHS3, MHS(L)3 6.5 7.0 7.5 8.0 MHS4 6.5 7.0 7.5 8.5 MHC2 30 to -10 30 to 30 to 22.5 to -10 -10 -10 MHW2 88 to 54 to 58 to 41 to 30 to -4 -5 -6 -5 -5 Air cylinder Unit: mm Tube I.D.