New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

ZSE30/ISE30

x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

Pressure Control Equipment

1 Pressure Control Equipment Regulators Series Application/Characteristics Port size Set pressure (MPa) Option Page Miniature regulator ARJ1020F Direct operated relieving type Back flow function Manifold M5 0.1 to 0.7 14-4-4 1 8 / 14-4-6 Miniature regulator ARJ210 Direct operated relieving type Bracket Pressure gauge M5 to 0.2 to 0.7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

ZSE1/ISE1

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

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AW20 (K) ro 40 (K) * When more than one sperrcalDn s.equ red, ndrcate n as.ending nlhe callhe. a phabetica order Port size Nole 1)The on y d ibrence lbm the standard specil lions s fre adjusting spring joflhe regutarol [do6 not resl(cl lhe sen ng ol02MPa ormore sYmbot Pgrt 1 0 20 40 Nole 2) Wlhout a valle tufclon M5 a 1/8 a a a a 3/8 a a 1i2 a 314 a Nole 3) For M5 and NPT thread rype Accessories

Size: For AC10, Thread: Rc, Port Size: M5X0.8

Body Size: -, Thread: -, Port Size: -, Option: -, Semi-Standard 1: -, Semi-Standard 2: -, Made to Order: -

Actuation: Normally Closed, Body: Base Mounted, Port Size: M5 x 0.8 w/Sub-Plate, Bracket: -

Actuation: Normally Open, Body: Base Mounted, Port Size: M5 x 0.8 w/Sub-Plate, Bracket: -

Pressure: 0~1MPa, Port Size: M5X0.8

Pressure: -101~0kPa, Port Size: M5X0.8

Pressure: 0~100kPa, Port Size: M5X0.8

Size: For AC1000, Model: Branch Port, Bracket: L Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Model: Branch Port, Bracket: T Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Model: Branch Port, Bracket: None, Thread: M Thread, Rc(PT), Port Size: M5