Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/8AS2201FG-01-08AS2211FG-01-08AS2301FG-01-08AS2311FG-01-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/8AS2201FG-01-08AS2211FG-01-08AS2301FG-01-08AS2311FG-01-08

Size: 22kW, Port Size: 1 1/2B Union, Source Voltage: Three Phase 200VAC, Accessory: -, Suffix: -

Size: 22kW, Port Size: 14 (1 1/2B Union), Source Voltage: 3 (Three Phase 200VAC)

E-ITV-STD-RF-A

Thi s product i s adj ust ed f or each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory.

Digital Flow Switch (Remote type monitor unit)

fluid [Ai r] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_ r] Accumulated flow external reset Page 32 [F 8] [drE] Display resolution [1E2] 100-split Page 35 [F 9] [PrS] Auto-preset [oFF] Manual Page 36 [F10] [EEP

Series CQ2

M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 230 + 2 (strokes) 200 2-Rc 1 2 (port size) 30 30 2 x 4-31.5 depth of counter bore 26 Width across flats 36 40 40 62 62 4-19 through 182 226 3 5.5 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth 33 143

MGP

MGPM, MGPL Common dimensions With double side scrapers Dimensions AW, EW, MT, DS (mm) (mm) For cylinder with double side scraper MT DS Bore size (mm) Bore size (mm) B FB AW FT EW MGPM 17 21 26 26 31 31 36 44 MGPL 15 19 21 21 26 26 31 36 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 63 63.5 69.5 76 82 87 106.5 126 16 16 20 20 22 22 28 35 74 74.5 82.5 89 95 100 120.5 143 5 5 6 6 6 6 6

V100

Other dimensions are same as grommet type. 10 9 107 101 8 96.5 90.5 7 86 80 6 75.5 69.5 5 65 59 4 54.5 48.5 3 44 38 20 stations Station L1 L2 2 stations 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 4-2-9 10 Series V100 Specific Product Precautions 1 Be sure to read before handling. 3.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Proper tightening torque (Nm) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) 6, 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% M3 M4 M5 M6 C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358

Compact Cylinder, CQ2-Z. 143 lb. 493.

Compact Cylinder, CQ2-Z. 143 lb.

Rotary Table/Rack & Pinion Style Series MSQ

switch Lm Reed auto switch Solid state auto switch D-M9(V), D-M9W(V) D-A9, D-A9V Size Rotation Hysteresis angle Hysteresis angle Operating angle m 10 10 10 10 10 10 10 Operating angle m 10 10 10 10 10 10 10 A B A B 90 80 65 50 45 40 35 55 45 35 30 25 20 15 190 190 190 190 190 190 190 10 20 30 50 70 100 200 45 62 68 83 95 108 139 27 35 39 49 54 61 81 31 39 43 53 58 65 85 49 66 72 87 99 112 143

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

accuracy [mm] Note 5)Finger backlash/ both sides [mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ1666 to 143