Compact manifold regulator ARM5 Series IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3. Tie-rod for Centralized Supply Block Note) SRP Symbol Description Without tie-rod Nil T O-ring SRF With tie-rod Note) The O-ring is attached to the manifold connection. Note) For details, refer to page 705.
50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148
Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok 1.3 x 10-10 P.526 XVD2-02S 522 Smooth Vent Valve (Supply Line) XVD Series RoHS How to Order 02
Special Application: Clean Series, Body Size: 40, Thread: NPT, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: Bracket, Not Attached, Bowl Type: None, Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]
Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: GH [G+H (Size 20 to 40)], Option: R+Z
Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: N+Z
Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Nameplate/Caution Plate for Bowl in Imperial Units
Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Non-relieving
Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: N+Z
Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Nameplate/Caution Plate for Bowl in Imperial Units
Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Non-relieving
Special Applications: Clean Series, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: N+Z
Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: GH [G+H (Size 20 to 40)], Option: N+Z
Special Applications: Clean Series, Body Size: 20, Reverse Flow: Reverse Flow Mechanism, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: N+Z
Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: 1+Z
Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 20, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Nameplate/Caution Plate for Bowl in Imperial Units
Special Applications: Clean Series, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: None, Option: N+Z
Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: G, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Right to Left Flow Direction
Special Applications: Clean Series, Body Size: 30, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Nameplate/Caution Plate for Bowl in Imperial Units
Special Applications: Clean Series, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Nameplate/Caution Plate for Bowl in Imperial Units