LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.
If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.
47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.
NPT G36-10-N01-L G36-4-N01-L 1 0.2MPa setting G G36-10-01-L G36-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Pressure gauge adaptor assembly ARP20P-310AS-N01 Aluminium die cast NPT ARP20P-310AS-F01 G ARP20P-320AS-01 Plug assembly Rc ARP20P-320AS-N01 NPT ARP20P-320AS-F01 G AR20P-370AS-01 Plug Rc AR20P-370AS-N01 PBT RESIN NPT AR20P-370AS-01 G AR23KP-020AS Check valve assembly
size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46
(mm) H (Width across flat) 12 12 17 12 17 19 14 17 19 17 19 Connection thread Rc Note 1) D M Weight (g) L1 L2 Model KQG2F23-01 KQG2F04-01 KQG2F04-02 KQG2F06-01 KQG2F06-02 KQG2F06-03 KQG2F08-01 KQG2F08-02 KQG2F08-03 KQG2F10-02 KQG2F10-03 KQG2F12-02 KQG2F12-03 KQG2F12-04 KQG2F16-03 KQG2F16-04 3.2 1/8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 23.3 23.7 28.7 24.2 29.2 30.6 26.3
Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series
(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.
mbe' ol scteno ds ror m red s ni e a rd d.lLhlevrrn! The naxrmln nJmbe I or sr.t o.s s delermried by lr toLa i!nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !
Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?
P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?
How to Order KKH 4 S M S 02 Body size With sealant (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket/Plug designation Socket S Piping port size variation Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.
ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission
Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.
ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission