5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

MG

@3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

JXCx-OMY0004

Alarm was generated in order of (1) -> (5) 16 Alarm 1 17 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 18 Alarm 3 Alarm 2 0 (1) (2) (3) (4) Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. Refer to 15.3. Alarms and countermeasures (P.66) for detailed alarm information. 19 Alarm 4 5 Please refer to 20.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

2 !3 !4 !5 !

C95

2 !3 !4 !5 !6 !7 !8 !

Clamp Cylinder with Lock

8 #4 !9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

A_HEC-OM-K001

. 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating Fluid . 4-5 TOC-1 A_HEC-OM-K001-1.7 Contents 4.2.3 Purge . 4-6 4.3 Wiring . 4-7 4.3.1 Circuit Breaker

A_HEC-OM-I009

Fig. 2-1 The position of attaching Warning label and Caution label -2-3 Fig. 2-2 Detail of Warning label and Caution label -2-3 Fig. 3-1 Installation environment -3-2 Fig. 3-2 Installation environment (when the back side has been blocked) -3-2 Fig. 3-3 Mounting -3-3 Fig. 4-1 Position of Model No. label -4-1 Fig. 4-2 Legend of Model No. label -4-1 Fig. 4-3 Outside drawings of Thermo-con -4

Booster Regulator/Air Tank

Description Piston seal 1 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 6 Mounting screw 12 7 Cover C assembly 1 Grease pack 1 1 2 1 2 The grease pack has 10 g of grease.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

HRX-OM-Y120

Communication alarm function . 4-1 4.1 Communication alarm occurs . 4-1 4.2 Communication alarm reset . 4-2 4.3 Setting method . 4-2 Chapter 5 Ethernet Modbus / TCP communication . 5-1 5.1 Request for taking measures for information security . 5-1 5.2 Precautions for wiring communication . 5-2 5.3 Connected explanation . 5-2 5.4 Communication specification . 5-3 5.5 Modbus/TCP communication

Programless Controller Series LECP1

Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) L Note 2) CN1 CN1 Sequencer power supply .

Modular Type Air Filters Series AF

Model AF20 AF40 AF40-06 AF50 1/8, 1/4 AF30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 Applicable Model Port size 1 Model AF30 AF40 AF40-06 AF50 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 30 AF X425 2 03 B Port size 1 30 AF 2 03 B X430 For high pressure Semi-standard: Select one each for a to c. Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

2 105 + 40 n = 4, 8, 12, 16 2 110 + 40 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 90 95 100 10 D-Y69/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115

Compact Manifold Regulator

Regulator Block Stations Stations Symbol 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations IN OUT IN OUT 4. IN/OUT Fitting Type (Refer to the figure below.)

ITV

25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

Refrigerated Air Dryers

x Eye bolt I.D. 25 670 (143) 1120 335 (50) 267 460 51 Facility water outlet R1/2 Ball valve 1276 1375 Facility water outlet R1/2 (When symbol 4 is specified.)

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Rotary Actuator/Vane Style Series CRB2

P611070-4 P611090-4 P611060-4 P611080-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P611010-4 MSQ Single/Double type Series CRB2 2 Switch Block Unit Part No. MSZ Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged. CRQ2X MSQX Unit part no.