Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 5.3 25 27 2H9 2 13.5 2H9 2 3 4.5 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

KP/KPQ/KPG

area mm2 Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing TPH TPS KPH04-00 37.4 18 4 4 4 10.4 4 L L2 L1 D D KPH06-00 39.6 19.5 10 10 6 12.8 6 M M L KPH08-00 44.4 21.5 26 18 10 15.2 8 K KPH10-00 48.6 24 41 29 15 18.5 10 KPH12-00 50.6 25 58 46 18 20.9 12 M Note 1) D indicates the maximum diameter.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

LEJ-OM002xx

LECSB(Pulse input) , LECSB-T(Pulse input / Positioning) (2) Driver (3) Motor cable (5) Lock cable DC24V (4) Encoder cable Host controller, etc (1) Electric actuator (6) I/O connector 4 - LECSC , LECSC-T(CC-Link) (2) Driver (3) Motor cable (5) Lock cable DC24V (4) Encoder cable Host controller, etc (1) Electric actuator (6) I/O connector LECSS ( SSCNET III ) , LECSS-T ( SSCNET III / H ) (

ZSM1-115/121

(Refer to Fig. (1) and (2).) E: Emitter Liquid contact part Wetted parts. Parts that are in contact with the process fluid. C: Collector B: Base B: Base E: Emitter C: Collector Load Electrical appliance connected to the output, e.g. relay, solenoid, etc. Fig. (1) NPN type Fig. (2) PNP type Operating humidity range Humidity range for normal operation.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The display unit conforms to the CE mark.

FGD-E

1/13 FGX-OM-L005-C Product Name Industrial Filter Model / Series / Product Number FGD series 2/13 FGX-OM-L005-C Contents Safety Instructions 3 Parts Descriptions and Functions 6 Product Specifications 7 How to Order 7 Dimensions 8 Installation and Piping 9 Maintenance 9 Maintenance parts 10 3 3/13 FGX-OM-L005 FGX L005-C Industrial Filter Safety Instructions Industrial Filter Industrial Filter

Air preparation filter

Part name (8) (7) (1) Body (2) Element (1) (3) Bowl (4) Auto drain (5) Flange (5) (6) Stopper (7) Element service indicator (8) Bracket (9) Drain port spacer (6) (10) Drain cock (2) (3) (4) (9) (10) Options and spare parts No.

PROFIBUS DP Compatible Fieldbus System

connectors. 1 5 Communication port C (COM C) 6 Communication port D (COM D) 7 Indicator Indicate the power supply status and communication status with PLC. 2 8 Station number switch protective cover Set address and bus terminator by using the switches under this cover. 2 9 Ground terminal (FE) Used for grounding. 1: For wiring method, refer to subsection "Wiring" (page 10) of section "EX500

VVXA21/22

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

CV/MVGQ

For details, refer to page 10-20-61. 10-15-6 Valve Mounted Cylinder Double Acting, Single Rod Series CVJ5 Construction/(Not able to disassemble.) RE A B REC CX CY MQQ M Component Parts RHC No. Description Rod cover No. Description Note Note Material Aluminum alloy Material Zinc alloy Clear anodized Plate q !2 MK(2) Refer to the note below.

5 Port Air Operated Valve

Please contact SMC for information on the suggested class 2 turbine oil (with additives), VG32. 6 VP450-OMH0003-C VPA4*50/4*70/VVPA4*0 Series Specific Product Precautions 1 Be sure to read this before handling. Handling Precautions of manifold Up to 3 stations can be added to the manifold when pressure is applied from only one air supply port (P port).

3 Position Cylinder Series RZQ

Circuit A 1) Transfer direction of load B C A Vertical movement Horizontal movement Circuit A ,Graph 1 ( Load is received by guide.) 2) Cylinder orientation Circuit A , Up Down Graph 2 P2 3) Cylinder load ratio P1 Regulator 0.25 to 0.5 Less than 0.25 Graph 2 Circuit B , Graph 1 , Circuit C , Minimum load weight = Graph 2 Selection graph Circuit B The optimum size is determined from the intersection

IZS30_eng

No 0-1Hz 1-3Hz 2-5Hz 3-8Hz 4-10Hz 5-15Hz 6-22Hz 7-33Hz 8-5 6 7 ; < = : 9 8 Generate only plus ion 9-Generate only minus ion 6. Selection and setting of equipment 6-1. Sensing DC mode 1. selection of bar length Select the length applicable to work size base on [2. static charge elimination area of 7-1. static charge elimination characteristics (reference)] 2.

Angle Seat Valve

can be connected. 45 22.5 27 1/8 Pilot port 17 D E OUT IN E 2 x P Port size A C B A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 Series VXB For Steam Replacement Parts How to order maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.