Nozzle Diameter: ø1.0, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Style,

Nozzle Diameter: ø1.0, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Style,

Nozzle Diameter: ø1.3, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Clean Regulator/Fluororesin Type

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Refrigerated Air Dryer

Drain outlet Evaporation thermometer Drain separator Volume control valve Capillary tube Compressor for refrigeration Pressure switch Condenser Fan motor Circuit for air, refrigerant 6 8 Series IDU E Dimensions IDU3E to 6E B E D A Q Illuminated switch Evaporation thermometer Ventilation air outlet Compressed air inlet F G Port size Compressed air outlet C Ventilation direction Ventilation

RSH

0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

70astamb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Material Rolled steel plate Rolled steel plate Carbon steel Rolled steel plate Carbon steel Steel wire Urethane Cast iron Lead-bronze casted Carbon steel Carbon steel Rolled steel No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS Series Workpiece mounting pitch: Same dimensions Table width Height q LEFS Series Height w Body mounting pitch: Same dimensions Body width The body bottom positioning pin holes have been standardized.

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.