XL-OMV0002

D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

MGC

B AP G H AC AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 M5 X 0. 8Depth10 5.6 25 90 62 45 15.5 9.5Depth6 24 106 22 M6 X 1Depth10 13 11 84 M6 X 1Depth12 6.8 30 103 65 45 16.5 26.5 11Depth8 M8 X 1.25Depth14 120 27 13 15 89 75, 100 125, 150 200, 250 300 M6 X 1Depth12 6.8 35 118 70 50 16.5 26.5 11Depth8 M8 X 1.25Depth14 135 32 13 15 94 8.6 40 140 75 50 34.5 M10 X 1.5Depth18 22 M8 X 1.25Depth16

IC

Sensor type Built-in sensor type, External sensor type Note 3) Set value retention 10 years when deenergized (EEPROM) Port size M5 female (built-in sensor type) Enclosure: POM Display: PC Material Gasket: NBR Panel mount adapter: POM Display protective cover: PC Approx. 330 g (Built-in sensor type) Weight Approx. 345 g (External sensor type) Note 1) The display accuracy is the accuracy of

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

MRQ

F: Angle adjustable range 5 E: Angle adjustable range 5 E: Angle adjustable range 5 Angle adjusting screw 0 0 8 0 1 e l g e n Allowable lateral load to the piston rod end gl a n ng a ti g us in j d st a Using friction fittings makes it easier to mount the load to the piston rod end. u m dj u m a ni Mi m F: Angle adjustable range 5 u m xi Ma 0 Mi 17 nim e um gl an ad g ju in st 0 M 19

Guide Cylinder Series MGG

C type snap ring for hole Bracket 16 Series MGG Dimensions Basic type/MGGB 20 to 50 4-F through, counter bore G Bottom 4-H Bracket (See table below.)

M-E05-1-LQ1

D-G d

IDX-OM-W053

D E F G H J K L M N P Q IDFA6E Rc3/4 270 455 498 31 42 283 80 230 32 15 240 80 275 275 15 6 2 6 6 3 (50/60Hz) AC200/200,220V GFCI R R L N PE TB ILS V V EDV OLR PTC PE CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-

IDX-OM-W014

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

Air Gripper for Collaborative Robots

Hexagon socket Head cap screws M4x10 Protection cover Attachments Hexagon socket Head cap screws M3x7 Air gripper JMHZ2-16D* Auto switch D-M9 Positioning pin3x6 O ring5x3x1 ISO9409-1-31.5-4-M5 Compliant Adapter plate. For opening the finger (O) Speed controller JAS-LEB04-M5 For closing the finger(S) Speed controller JAS-LEA04-M5 Hexagon socket head cap screwM4x20 5 - 3.

MLGC

Note 3) Common with cushion ring gasket A except for standard stroke of 20 and 25. 3.2-6 Fine Lock Cylinder with Guide Series MLGC Basic/With Rear Plate MLGClBl-l-R-l CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF Standard Stroke Stroke range (mm) AC AB AF B E AD A Bore size (mm) AA AE AP BP BZ C D F G GC MXW Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 20 25 32 40 75, 100, 125, 150, 200

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) p: For thread type: M5 and NPT only Note 8) c: Combination available for options: E1, E2, E3, E4. 4 Series ARP20/30/40 Specifications ARP20(K) ARP30(K) ARP40(K) Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.7 MPa Ex.) ARP30-02BG For 0.4 MPa setting 0.005 to 0.4 MPa Set pressure range Note 1) Ex.)

High Power Cylinder:

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (

Parallel Type Air Gripper Series MHZ

mm Operating temperature C Material Refer to catalog CAT.501-B "Air Fittings and Tubing" regarding One-touch fittings and tubing. 8 Series MHZA2-6 Parallel Type/Compact Series Axial Port (with One-touch Fitting) [K] MHZA2-6 K MHZAJ2-6 K S C S C End boss assembly Applicable tube 4 -0.013 -0.035 7.8 7.8 8f8 20 4 5 Max. 6.7 33.8 12 10 23.7 Specifications and dimensions other than the above

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

HEC-OM-U015

For example, if -0.15 C is set here, the actual reference temperature for control is lower than the indicated SV by 0.15 C. 5.6 Preparation for facility water M5,M6 screws (bolts) or equivalent to the fix the product.