NAIV

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

Vacuum Module: Ejector System Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

Air Slide Table Series MXQ

L L+A Fig. 1 Fig. 2 L 2 1 V E = W ( ) 2 1000 Collision speed V = 1.4 Va Find the kinetic energy E (J) of the load. 1 420 E = 1 ( ) = 0.088 2 1000 V = 1.4 x 300 = 420 Correction factor (reference value) Find the allowable kinetic energy Ea (J).

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

A 67 G1/2 [3(R) port] (25.5) Type E 66.9 LOCK PUSH 5

IZ-OMK0015

Attach the ionizer body and brackets with M5 screws. (5) Adjust the angle of the ionizer body to make the static neutralization effective, and fix with the rotating set screws (M5) of each bracket. (6) Make sure to ground with the ground resistance of 100 ohms or less by connecting DC1(-) lead wire [blue] M5 M5 screws of the power supply cable.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Smooth Vent Valve

x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port

High Vacuum L Type Valve

C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

HRX-OM-W032

Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B Pump E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)

Rotary Actuator

Please refer below for calculation of kinetic energy. 2 I 2 1 E E : Kinetic energy J I: Inertia moment kg/m2 : Angular speed rad/s Allowable kinetic energy for the rotary actuator is limited. The limit of rotation time is obtained by calculating inertia moment. Please refer following for obtaining inertia moment.

LEJ-OM002xx

Check the product for the following points before operation. a) Damage to power supply line and signal line. b) Looseness of the connector to each power line and signal line. c) Looseness of the actuator /cylinder and controller /driver mounting. d) Abnormal operation. e) Emergency stop of the total system. 3.

Mini Rotary Actuator

Allowable kinetic energy (J) t Model Allowable kinetic energy (mJ) : Rotation angle [ rad ] : Rotation time [ s ] Basic type CRJB05 0.25 Kinetic energy E is obtained by: With external stopper CRJU05 1.0 Basic type CRJB1 0.40 Basic type CRJU1 2.0 E Therefore, the rotary table rotation time is: E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] During

Digital Flow Switch

Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45

Parallel Type Air Gripper Series MHZ

Weights Unit: g (oz) End boss type (symbol) Model H E M K MHZA2-6 28 (0.99) 28 (0.99) 28 (0.99) 28 (0.99) MHZAJ2-6 29 (1.02) 29 (1.02) 29 (1.02) 29 (1.02) 9

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.