Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Clean Air Module

in 24 variations Available in 24 variations Digital flow switch Regulator Regulator + Pressure outlet port ON/OFF valve Restrictor Filter Regulator + Filter Digital flow switch + Regulator + ON/OFF valve + Filter Regulator + ON/OFF valve + Restrictor + Filter LLB4 Flow range: 50 to 500 L/min (ANR) LLB3 Flow range: 5 to 100 L/min (ANR) Related Equipment Pressure gauge for clean room G46-4-01

Compact and

Applicable tubing O.D. 6 10.4 9.7 L1 L2 13.3 12 13.3 2 x Connection thread Rc1/8 13.3 12 L1 One-touch Connection Screw-in Connection Model L1 L2 ZU05mA 52 25.4 ZU07mA 59 32.4 Model L1 ZU05mA01 67.2 ZU07mA01 74.2 2 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 01 (ø1/8")

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)