(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

Two Hand Control Valve

2 x M5 x 0.8 Thread depth 5 26 9.5 Bracket mounting dimensions 66 54 7.5 30 10.4 30 42 10.4 2 x 6.5 2 x 6.5 42 8 54 66 Back side mounting Bottom mounting 1684 VR51 Series Specific Product Precautions 1 Be sure to read this before handling the products.

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

D-X Technical Data 293

EX500-GEN2_eng

Before Use Fieldbus system EX500-GEN2 Product Summary Mounting and Installation LED Display Installation System configuration Direct mounting Install the product using 4 M5 screws x 15 mm or longer with a head 5.2 minimum.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Lead wire length symbols: 0.5 m Nil(Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are applicable auto switches other than the above, refer to page 538 for details. For detail about auto switches with pre-wired connector, refer to pages 1328 to 1329. Auto switches are shipped together but not assembled.

High Vacuum L Type Valve

Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

Copper, fluorine and silicone-free + Low particle generation Bore size (mm) Auto switch Port type Nil Without auto switch Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol For applicable auto switches, refer to the Applicable Auto Switch. 21 22 Relief type Vacuum suction type CXSL CXSL Nil 25, 32 TN TF Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Auto switch mounting Bore

Air Cylinder Series MB

Bore size (mm) Part no. l Applicable cotter pin m Dd9 L d H B C 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03Note 1) 10 14 22 25 44 36 4 4.5 5 5 3 4 4 4 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 6 8 11 13 16 16 17 22 27 32 41 41 19.6 25.4 31.2