High Vacuum Angle Valve, XL Series

Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

Air cylinder

W a r n i n g As a minimum, maintenance should be performed according to the above items. Perform additional maintenance as necessary. Improper handling can cause damage and malfunction of equipment and machinery. Removal of equipment, and supply/exhaust of compressed air.

Air cylinder

W a r n i n g As a minimum, maintenance should be performed according to the above items. Perform additional maintenance as necessary. Improper handling can cause damage and malfunction of equipment and machinery. Removal of equipment, and supply/exhaust of compressed air.

Clamp Cylinder

W a r n i n g ~ Design a circuit to prevent sudden action of a driven object.

Air cylinder

W a r n i n g As a minimum, maintenance should be performed according to the above items. Perform additional maintenance as necessary. Improper handling can cause damage and malfunction of equipment and machinery. Removal of equipment, and supply/exhaust of compressed air.

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".

CRQ2

I = m + mL kgm 2 r Find the actual moment of inertia I.

AWM20 to AWM40

w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

AWM20 to AWM40

w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = m + mL kgm 2 r Find the actual moment of inertia I.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

Rotary Table/Rack & Pinion Style Series MSQ

0 y w @4 !5 !4 @3 @2 !3 CRA1 !6 !7 !8 u @0 q @1 !2 !1 CRQ2 !8 !7 MSQ MSZ CRQ2X MSQX MRQ MSQAA (High precision type) !9 e r Component Parts Note Anodized Anodized Chromated No.

AMX-OM-L024_e

Fl ush i nsi de of pi pi ngs w i t h ai r. Ensure no l eakage. Keep si ght gl ass i n f ront . N ever f ai l t o i nst al l one of AM , AM D , AM H as a pref i l t er. N ever f ai l t o use dry ai r.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Series VS

Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B 7. Detent assembly SF4-mF-30 SF4-mF-30 8.