Pneumatic Purification

10 1/4 2.48 0.39 1.46 0.84 AFF-EL2B 6.78 AFF4B-N03C-T 26 3/8 2.99 0.39 1.46 1.21 AFF-EL4B 8.04 AFF8B-N04C-T 53 1/2 3.55 0.39 1.46 1.98 AFF-EL8B 8.87 AFF11B-N06C-T 73 3/4 4.18 0.39 1.46 3.09 AFF-EL11B 10.2 AFF22B-N10C-T 123 1 4.8 0.39 1.46 4.63 AFF-EL22B 14.22 AFF37B-N14D-T 212 1 1/2 6.3 0.39 1.46 9.26 AFF-EL37B 18.64 AFF75B-N20D-T 424 2 8.67 0.39 1.46 23.15 AFF-EL75B 18.64 AFW675-N20-E1 675

Thermo-chiller Basic Type HRSE Series

RoHS Thermo-chiller Basic Type HRSE Series How to Order Single-phase 100 VAC HRSE A 018 10 Option Cooling capacity 012 Cooling capacity 1000/1200 W (50/60 Hz) 018 Cooling capacity 1400/1600 W (50/60 Hz) Symbol Option Nil None T High pressure pump mounted Note) Cooling method Note) The cooling capacity will decrease by about 100 W from the value in the catalog.

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

VZ3000

(b) Lever 3-3-42 5 Port Solenoid Valve Base Mounted Series VZ3000 Exploded View/DIN Rail Manifold Type 45F Manifold w i e VK t VZ U side q VF y VFR VP4 Location of addition w VZS (a) Bolt (Both sides) VFS r VS4 Replacement Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No. Part no.

5 Port Solenoid Valve SY Series

y q e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

COQ2BP

Siit:;, ,; f'I":1' Reed Switch White o--~~c:O::T--~o Black ~ $ 't. " I CDQ2 J>;,:: 9 9 10 U Response Range The range where auto SWitch turns on. 6SIIIC 11 Series CDQ2BP High Magll8tic Field Resistance Hs D-P7 P8 Auto Switch Mounting Position Minimum Allowable Stroke c MInimum No. of Auto swilehes . oetup pooIIion Symbol _(mml . 063 e80 I 060 1 pc

Compact Type

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

VQC

B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

VM

POM Stainless steel Material Note y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

Coolant Valve

VCC 0.4 0.3 TQ 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 619 A VNC Series Construction N.C. i i o o t t r w r w Port 12(P1) Port 10(P2) u u In the case of 32A to 50A y y N.C.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Clean Regulator/Fluororesin Type

2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Rotary Table/Rack & Pinion Style Series MSQ

g n k n k ra c oc ra o t cl cl en nt er er e tm m nt nt e is 0 u us t 0 u C w us o o k lo c o C dj C l 19 C 19 dj se c Cl A k A A wi w oc e e dj A ck is ng ng k dj o u wi e Cl st us se ro ra ra m ta ro t m ta ti d e ti n o on e n n e n nt nt en tio tio d ra ra 5 n n g ta e ta 9 g e 5 9 ro ro m m u u im im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

VS7-6

Unit/Specifications Air filter (w/auto-drain, w/manual drain) 5m Filtration Regulator 0.05 to 0.85MPa Set press.

Compact Cylinder

0 i r t !2 !4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

e r t q w e r t i i o o !

Electric Actuator / Slider Type 《 AC Servo Motor 》

Stop 1)CC-Link cable (LECSC, LECSC-T), SSCNETIII cable (LECSS, LECSS-T) 2)When using test operation mode (JOG operation), the LECSC, LECSS, LECSC-T, LECSS-T need the MR-Configurator2TM. 6 - 1.3 Gain tuning 1.3.1 Procedure Here are the steps for basic gain tuning. Refer to the Driver operation manual for details and for tuning methods other than shown below.

Compact Cylinder with Lock Series CLQ

Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon steel Material: Rolled steel (mm) (mm) Applicable bore size (mm) Applicable retaining ring Part no. Applicable bore size (mm) Part no.