3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

There is no stick-slip phenomenon at a low-speed operation of '10-50mm/s, and all strokes advance at a constant speed smoothlv.

Self-seal Fittings Series KC

Nylon Urethane M Q L D KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 4 6 8 10 12 2.8 2.8 7.6 7.6 13.7 11.1 21.1 19.0 28.3 24.3 18 19 21.5 24 25.5 5.3 6.1 7.1 7.9 8.6 28.6 32.7 39.2 45.5 49.2 10.4 12.8 15.2 18.5 20.9 9 16 24 39 52 Note) D: max. diameter Union Y: KCU Effective orifice(mm 2) Weight (g) Applicable tube O.D. (mm) Part No.

IDX-OM-W035

S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E/75E =M4X10 3 2 1 0.25inch (6.5mm) 0.4inch (

Title not found

There is no stick-slip phenomenon at a low-speed operation of '10-50mm/s, and all strokes advance at a constant speed smoothlv.

Steam Valve

121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5

CLS

8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5

Transfer

CE2 ML2B ML2B ML2B/W1 ML2B/W2 ML2B/W3 ML2B/W4 50 10 10 20 4 5 3 4 5 10 Load weight (kg) Load weight (kg) Load weight (kg) Load weight (kg) 10 3 5 4 3 2 2 5 2 1 1 1 0.5 0.4 0.3 0.5 0.4 0.3 ML2B40 ML2B40 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B32 ML2B32 ML2B40 ML2B40 ML2B32 ML2B32 ML2B25 ML2B25 ML2B40 ML2B40 ML2B32 ML2B32 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 100 200 300 400

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Smooth Cylinder Series CQSY

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY SY100-77-1A 10 stations 10 P R P port SYJ M5 X 0.8 Note 1) Piping to exhaust port not possible. VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ...

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

During disassembly and assembly, confirm that there are no scratches or damage, etc, on the O-ring. 13-10-10

VVXA21/22

10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when