SMC Corporation of America
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ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

4 3 1 7 9 SA 1 (P) VA 4 (B) 2 (A) 3 (R) 2 SA VA VH300/400 VM 8 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium

Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard. (UL standard V-0) R 3 8 R KE 1 2 R Note 1) : Brass parts are electroless nickel plated, provided as standard.

Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 BUS IN: RJ45 8-pin socket No. Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 Use only plugs conforming to FCC standards. Shielded Ethernet cable is recommended.

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

340 369 3/4, 1 615 3/8, 1/2 FGH300 70 x L496 591 620 3/4, 1 69 HEPO2Element for FGH Series EJ Series RoHS Specifications Model EJS-002 EJS-004 EJS-006 EJS-013 Filtration accuracy (Filtration efficiency 99%) 2 4 6 13 1890 2310 2090 2490 117 mm Length Filtration area (cm2) 4250 5200 4700 5600 246 mm 8500 10400 9400 11200 496 mm Heat resistant temperature (C) 80 Filter media Polyester Material

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / / / / / & & & & 1 2 2 3 ( ( ( ( ) ) ) ) 1 1 1 1 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 5 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / DC ( ( ( ( ) ) ) ) 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ISO VG32 IP65 IP67IEC60529 IP65 IP67 (MSDS) [ [ [ [ ] ] ] ] 1 ISO VG32 11 ISO VG32 2 ISO VG32 2 6 No.VQ1000V-OMV0001

234 6 255 272 7 293 310 Electrical entry position: Manifold block 2-G1, 1 1/4 Type SU Formula/Stations L1 = 38n + 27 L2 = 38n + 44 Formula for manifold weight M = 0.325n + 0.39 (kg) 2 103 120 3 141 158 4 179 196 5 217 234 6 255 272 7 293 310 ( ) Electrical entry position: Valve body ( ): DC 3-9-6

1 1 G High cylinder operation speed.

M 1 2 x 1 Cable connection threads suP (1) 2-Ro(PT) 114,318, 1/2 Port size Mounting hole L-bracket tNt-398-0-6 (optional) 2-Rc(PT) 1/4,3/8, 1/2 SUP port, OUT port Eleclno-Pltoulnalic Relulatnn rTUz000/3 lt'iler ilile $ruciliciliotts 2 through I station manifold.

P2 A R P1 0.5 s or more R P2 No output A A 1683 A VR51 Series Dimensions 70 45 (18) 4.9 Supply port P1(11) Flame resistant One-touch fitting: 6, 1/4 Exhaust port (with silencer) R(4) 10 26 9 27 Supply port P2(12) Flame resistant One-touch fitting: 6, 1/4 Output port A(2) Mounting thread 11.5 22 Flame resistant One-touch fitting: 6, 1/4 2 x M5 x 0.8 Thread depth 5 45 Mounting thread

AC PB0111-3 (PB0111) DC Manual override (With lock) PB0111-1 Manual override (Non-locking) PB0101 PB0101-1 Note) There is polarity of (1) +, (2) . ( ): With indicator light 4-16-2 3 Series VS3115/3110 Dimensions Body ported VS3115-G VS3115-D 2-6 mounting hole 2-6 mounting hole V100 SY SYJ G 1/2 (Cable 8 to 10) Manual override Manual override VK VZ Courtesy of Steven Engineering, Inc.-230

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.