Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)
Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature
Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C)
Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)
Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Option 1: N (w/o Lead Wire and M8 Connector), Unit Specification: M (SI Unit Only)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)
Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: C (Out 1: NPN; Out 2: Analog 1 to 5 V), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Option 1: N (w/o Lead Wire and M8 Connector), Unit Specification: M (SI Unit Only)
Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: A (Out 1: NPN; Out 2: NPN), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: B (Out 1: PNP; Out 2: PNP), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: M (SI Unit Only)
Rated Flow Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Option 1: N (w/o Lead Wire and M8 Connector), Unit Specification: M (SI Unit Only)
Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: A (Air-cooled Refrigeration), Power Supply: 20 [3-phase 200VAC (50 Hz); 3-phase 200 to 230VAC (60 Hz)], Option: M (Applicable to DI Water Piping)
Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: A (Air-cooled Refrigeration), Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: M (Applicable to DI Water Piping)
Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: W (Water-cooled Refrigeration), Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: M (Applicable to DI Water Piping)
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;
Cooling Capacity: 060 (Cooling Capacity: 4900/5900, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]
Model: 0 to -101kPa, Piping: ø4, ø5/32" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -
Model: 0 to -101kPa, Piping: ø6 One-touch Fitting, Straight Type, Output: NPN Open Collector 2 Outputs, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -